Inventor · disambiguated record
Tsung-Min Huang
Also filed as: HUANG TSUNG-MIN
42 granted patents·4 pending applications·902 citations·filing 2003–2019
97Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD24TAIWAN SEMICONDUCTOR MFG15HUANG TSUNG-MIN3HUANG CHIEN-HUA1WEI ZIN-CHANG1
Top patents by PatentIndex Score
46 records- 0199US9184054B1Method for integrated circuit patterningTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Nov 10, 2015·786 cites·20 claims
- 0297US9123776B2Self-aligned double spacer patterning processTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 1, 2015·26 cites·20 claims
- 0393US9911646B2Self-aligned double spacer patterning processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Mar 6, 2018·6 cites·20 claims
- 0491US9099400B2Semiconductor device manufacturing methodsTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Aug 4, 2015·9 cites·20 claims
- 0589US9406614B2Material and process for copper barrier layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 2, 2016·7 cites·22 claims
- 0688US9252049B2Method for forming interconnect structure that avoids via recessTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Feb 2, 2016·7 cites·14 claims
- 0788US8927413B2Semiconductor structure and semiconductor fabricating process for the sameTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Jan 6, 2015·8 cites·19 claims
- 0887US9129906B2Self-aligned double spacer patterning processTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 8, 2015·6 cites·20 claims
- 0984US9818695B2Material and process for copper barrier layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Nov 14, 2017·3 cites·20 claims
- 1084US8409997B2Apparatus and method for controlling silicon nitride etching tankWEI ZIN-CHANG·Filed 2007·Granted Apr 2, 2013·11 cites·16 claims
- 1183US9646932B2Method for forming interconnect structure that avoids via recessTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 9, 2017·3 cites·20 claims
- 1282US8883646B2Self-assembled monolayer for pattern formationHUANG TSUNG-MIN·Filed 2012·Granted Nov 11, 2014·6 cites·20 claims
- 1381US9947535B2Trench formation using horn shaped spacerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 17, 2018·2 cites·20 claims
- 1480US9136162B2Trench formation using horn shaped spacerTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 15, 2015·3 cites·20 claims
- 1580US9029171B2Self repairing process for porous dielectric materialsHUANG TSUNG-MIN·Filed 2012·Granted May 12, 2015·4 cites·20 claims
- 1679US9831117B2Self-aligned double spacer patterning processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Nov 28, 2017·2 cites·20 claims
- 1776US9136166B2Interconnect structure and methods of making sameTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 15, 2015·3 cites·20 claims
- 1874US9368348B2Self-aligned patterning processTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 14, 2016·2 cites·19 claims
- 1971US9576893B2Semiconductor structure and semiconductor fabricating process for the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Feb 21, 2017·2 cites·20 claims
- 2070US9093386B2Spacer-damage-free etchingTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jul 28, 2015·1 cites·20 claims
- 2168US9129967B2Integrated circuit device having a copper interconnectTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Sep 8, 2015·2 cites·17 claims
- 2267US9275873B2Masking process and structures formed therebyTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 1, 2016·1 cites·15 claims
- 2366US10916443B2Spacer-damage-free etchingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Feb 9, 2021·0 cites·20 claims
- 2466US9576851B2Interconnect structure and methods of making sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 21, 2017·1 cites·20 claims
- 2566US9449839B2Self-assembled monolayer for pattern formationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Sep 20, 2016·1 cites·20 claims
- 2660US10283371B2Spacer-damage-free etchingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 7, 2019·0 cites·19 claims
- 2756US9601346B2Spacer-damage-free etchingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 21, 2017·0 cites·19 claims
- 2855US10186455B2Interconnect structure and methods of making sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 22, 2019·0 cites·19 claims
- 2955US9514979B2Trench formation using horn shaped spacerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 6, 2016·0 cites·20 claims
- 3055US9257282B2Method of semiconductor integrated circuit fabricationTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Feb 9, 2016·0 cites·20 claims
- 3154US10049878B2Self-aligned patterning processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 14, 2018·0 cites·20 claims
- 3254US9607850B2Self-aligned double spacer patterning processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 28, 2017·0 cites·20 claims
- 3353US9768031B2Semiconductor device manufacturing methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 19, 2017·0 cites·21 claims
- 3453US9735048B2Semiconductor device and fabricating process for the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 15, 2017·0 cites·20 claims
- 3553US9728408B2Method of semiconductor integrated circuit fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 8, 2017·0 cites·20 claims
- 3653US9502249B2Masking process and structures formed therebyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Nov 22, 2016·0 cites·20 claims
- 3753US9418862B2Method for integrated circuit patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 16, 2016·0 cites·20 claims
- 3852US8834671B2Apparatus and method for controlling silicon nitride etching tankTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 16, 2014·0 cites·12 claims
- 3951US9245841B2Semiconductor device and fabricating process for the sameHUANG CHIEN-HUA·Filed 2012·Granted Jan 26, 2016·0 cites·19 claims
- 4050US9806026B2Self repairing process for porous dielectric materialsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 31, 2017·0 cites·20 claims
- 4148US9679803B2Method for forming different patterns in a semiconductor structure using a single maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jun 13, 2017·0 cites·20 claims
- 4246US9558927B2Wet cleaning method for cleaning small pitch featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 31, 2017·0 cites·20 claims
- 4341US2008047589A1Apparatus and methods of cleaning substratesTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 4441US2012305117A1Lead-free valve of faucet and process of manufacturing sameHUANG TSUNG-MIN·Filed 2011·Application pending·0 cites
- 4536US2005025848A1Air filter shaping moldFiled 2003·Application pending·0 cites
- 4633US2005022490A1Vehicle air cleanerFiled 2003·Application pending·0 cites
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