Inventor · disambiguated record

Huan-Wen Lai

Also filed as: LAI HUAN-WEN

2 granted patents·3 citations·filing 2003–2012

42Inventor score

Technology areasH01J H10P

Files withLEE CHIH TSUNG1 TAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

2 records

0161US9982340B2Shower head apparatus and method for controlling plasma or gas distributionLEE CHIH TSUNG·Filed 2012·Granted May 29, 2018·2 cites·17 claims
0232US7102871B2Electrostatic chuck assembly having disassembling deviceTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Sep 5, 2006·1 cites·16 claims

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