Inventor · disambiguated record
Akihiko Kawamura
Also filed as: KAWAMURA AKIHIKO
5 granted patents·1 pending application·5 citations·filing 2014–2022
68Inventor score
Files withCANON KK6
Top patents by PatentIndex Score
6 records- 0172US10031429B2Method of obtaining position, exposure method, and method of manufacturing articleCANON KK·Filed 2014·Granted Jul 24, 2018·3 cites·27 claims
- 0269US9423700B2Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing methodCANON KK·Filed 2014·Granted Aug 23, 2016·1 cites·13 claims
- 0363US9377702B2Patterning method, lithography apparatus and system, and article manufacturing methodCANON KK·Filed 2015·Granted Jun 28, 2016·1 cites·19 claims
- 0457US2022412894A1Information processing apparatus and monitoring method for detecting abnormality of monitoring targetCANON KK·Filed 2022·Application pending·0 cites
- 0554US9880475B2Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing methodCANON KK·Filed 2016·Granted Jan 30, 2018·0 cites·11 claims
- 0649US12253834B2Information processing device, determination method, molding defect inspection device, molding device, and method for manufacturing productCANON KK·Filed 2021·Granted Mar 18, 2025·0 cites·22 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →