Inventor · disambiguated record
Michael Carris
Also filed as: CARRIS MICHAEL
9 granted patents·269 citations·filing 2003–2009
91Inventor score
Top patents by PatentIndex Score
9 records- 0195US7420275B1Boron-doped SIC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2006·Granted Sep 2, 2008·39 cites·20 claims
- 0294US7573061B1Low-k SiC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2007·Granted Aug 11, 2009·24 cites·14 claims
- 0394US7163889B2Film for copper diffusion barrierNOVELLUS SYSTEMS INC·Filed 2005·Granted Jan 16, 2007·29 cites·14 claims
- 0492US7968436B1Low-K SiC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2009·Granted Jun 28, 2011·15 cites·24 claims
- 0592US7282438B1Low-k SiC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Oct 16, 2007·53 cites·8 claims
- 0691US7842604B1Low-k b-doped SiC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2007·Granted Nov 30, 2010·17 cites·21 claims
- 0789US7239017B1Low-k B-doped SiC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Jul 3, 2007·42 cites·7 claims
- 0887US6967405B1Film for copper diffusion barrierYU YONGSIK·Filed 2003·Granted Nov 22, 2005·41 cites·16 claims
- 0963US9659769B1Tensile dielectric films using UV curingVARADARAJAN BHADRI·Filed 2004·Granted May 23, 2017·9 cites·35 claims
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