Inventor · disambiguated record
Yoshikazu Miyajima
Also filed as: MIYAJIMA YOSHIKAZU
51 granted patents·6 pending applications·609 citations·filing 1986–2018
98Inventor score
Top patents by PatentIndex Score
57 records- 0195US6801301B2Exposure apparatusCANON KK·Filed 2002·Granted Oct 5, 2004·78 cites·14 claims
- 0295US6409783B1Air cleaner system for motorcycleHONDA MOTOR CO LTD·Filed 2000·Granted Jun 25, 2002·60 cites·20 claims
- 0392US6583859B2Stage device, an exposure apparatus and a device manufacturing method using the sameCANON KK·Filed 2001·Granted Jun 24, 2003·35 cites·24 claims
- 0492US6266133B1Stage device, an exposure apparatus and a device manufacturing method using the sameCANON KK·Filed 1999·Granted Jul 24, 2001·84 cites·17 claims
- 0591US7130016B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Oct 31, 2006·13 cites·10 claims
- 0689US7423724B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Sep 9, 2008·11 cites·19 claims
- 0789US7379162B2Substrate-holding techniqueCANON KK·Filed 2004·Granted May 27, 2008·23 cites·8 claims
- 0888US7321418B2Stage apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Jan 22, 2008·11 cites·8 claims
- 0988US7307698B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Dec 11, 2007·10 cites·12 claims
- 1088US7196769B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Mar 27, 2007·10 cites·11 claims
- 1187US7224432B2Stage device, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted May 29, 2007·12 cites·15 claims
- 1284US6320649B1Stage system for exposure apparatusCANON KK·Filed 1999·Granted Nov 20, 2001·53 cites·28 claims
- 1381US10406743B2Imprint apparatus, imprint method, and method of manufacturing articleCANON KK·Filed 2015·Granted Sep 10, 2019·3 cites·8 claims
- 1480US10335984B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2015·Granted Jul 2, 2019·3 cites·15 claims
- 1579US7312848B2Positioning apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Dec 25, 2007·5 cites·6 claims
- 1679US7301602B2Stage apparatus and exposure apparatusCANON KK·Filed 2005·Granted Nov 27, 2007·5 cites·17 claims
- 1778US6262794B1Exposure apparatus and device manufacturing methodCANON KK·Filed 1998·Granted Jul 17, 2001·41 cites·28 claims
- 1877US7602476B2Substrate-holding techniqueCANON KK·Filed 2007·Granted Oct 13, 2009·4 cites·4 claims
- 1977US7289194B2Positioning apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Oct 30, 2007·5 cites·11 claims
- 2075US7999919B2Substrate holding techniqueCANON KK·Filed 2007·Granted Aug 16, 2011·5 cites·10 claims
- 2174US7345737B2Exposure method and apparatus having a projection optical system in which a projection gap is filled with liquidCANON KK·Filed 2004·Granted Mar 18, 2008·13 cites·11 claims
- 2273US6836031B2Linear motor and exposure apparatus using the sameCANON KK·Filed 2001·Granted Dec 28, 2004·18 cites·12 claims
- 2372US5379283AMagneto-optical recording/reproducing method with optical head servo inhibited during magnetic head loadingCANON KK·Filed 1994·Granted Jan 3, 1995·19 cites·3 claims
- 2470US10406731B2Application device, imprinting apparatus, and method for manufacturing objectCANON KK·Filed 2018·Granted Sep 10, 2019·0 cites·19 claims
- 2570US7426013B2Exposure apparatus and device fabrication methodCANON KK·Filed 2006·Granted Sep 16, 2008·2 cites·7 claims
- 2670US7046335B2Exposure apparatus and device fabrication methodCANON KK·Filed 2004·Granted May 16, 2006·8 cites·6 claims
- 2769US9952504B2Imprint method, imprint apparatus, and method for manufacturing deviceCANON KK·Filed 2014·Granted Apr 24, 2018·1 cites·3 claims
- 2869US7253877B2Exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Aug 7, 2007·2 cites·7 claims
- 2969US5604719AMagnetooptical information recording/reproducing method and apparatus employing a floating slider supporting a magnetic headCANON KK·Filed 1994·Granted Feb 18, 1997·18 cites·21 claims
- 3068US10112324B2Imprint method, imprint apparatus, and production method for articleCANON KK·Filed 2014·Granted Oct 30, 2018·1 cites·5 claims
- 3167US7349063B2Reflection mirror apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2003·Granted Mar 25, 2008·8 cites·15 claims
- 3266US6791670B2Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance methodCANON KK·Filed 2001·Granted Sep 14, 2004·14 cites·47 claims
- 3365US7253878B2Exposure apparatus and device fabrication methodCANON KK·Filed 2006·Granted Aug 7, 2007·1 cites·14 claims
- 3465US7236230B2Exposure apparatus and device fabrication methodCANON KK·Filed 2004·Granted Jun 26, 2007·7 cites·11 claims
- 3564US7319510B2Stage device, exposure apparatus using the unit, and device manufacturing methodCANON KK·Filed 2005·Granted Jan 15, 2008·1 cites·8 claims
- 3661US10022900B2Application device, imprinting apparatus, and method for manufacturing objectCANON KK·Filed 2015·Granted Jul 17, 2018·0 cites·20 claims
- 3756US7315347B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2004·Granted Jan 1, 2008·4 cites·12 claims
- 3855US7463335B2Exposure apparatus, and device manufacturing methodCANON KABUHSIKI KAISHA·Filed 2007·Granted Dec 9, 2008·0 cites·7 claims
- 3955US4843600ARecording head for magneto-optical information recording apparatusCANON KK·Filed 1986·Granted Jun 27, 1989·10 cites·11 claims
- 4053US7212277B2Substrate holding techniqueCANON KK·Filed 2004·Granted May 1, 2007·3 cites·12 claims
- 4152US7061580B2Exposure apparatus and device fabrication methodCANON KK·Filed 2004·Granted Jun 13, 2006·2 cites·15 claims
- 4249US7236228B2Exposure apparatusCANON KK·Filed 2004·Granted Jun 26, 2007·4 cites·11 claims
- 4348US8159093B2Motor apparatus, manufacturing method, exposure apparatus, and device fabrication methodIWATANI SATOSHI·Filed 2009·Granted Apr 17, 2012·1 cites·20 claims
- 4447US2017057154A1Imprint apparatus, imprint method, and method of producing articleCANON KK·Filed 2016·Application pending·0 cites
- 4546US9927725B2Lithography apparatus, lithography method, program, lithography system, and article manufacturing methodCANON KK·Filed 2016·Granted Mar 27, 2018·0 cites·19 claims
- 4646US9915881B2Lithography apparatus and article manufacturing methodCANON KK·Filed 2015·Granted Mar 13, 2018·0 cites·10 claims
- 4746US2015004275A1MoldCANON KK·Filed 2014·Application pending·0 cites
- 4844US7408276B2Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding memberCANON KK·Filed 2004·Granted Aug 5, 2008·1 cites·2 claims
- 4943US10197910B2Imprint apparatus, imprint method, and method of manufacturing articleCANON KK·Filed 2015·Granted Feb 5, 2019·0 cites·34 claims
- 5041US10409156B2Mold, imprint apparatus, and method of manufacturing articleCANON KK·Filed 2016·Granted Sep 10, 2019·0 cites·9 claims
Showing the top 50 of 57 patent records by PatentIndex Score.
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