Inventor · disambiguated record
Abhay Bhushan
Also filed as: BHUSHAN ABHAY · BHUSHAN ABHAY K
16 granted patents·702 citations·filing 1994–2001
96Inventor score
Technology areasH10P
Top patents by PatentIndex Score
16 records- 0193US5571337AMethod for cleaning and drying a semiconductor waferYIELDUP INTERNATIONAL·Filed 1995·Granted Nov 5, 1996·137 cites·44 claims
- 0291US6491043B2Ultra-low particle semiconductor cleanerSCD MOUNTAIN VIEW INC·Filed 2001·Granted Dec 10, 2002·38 cites·27 claims
- 0386US5772784AUltra-low particle semiconductor cleanerYIELDUP INTERNATIONAL·Filed 1995·Granted Jun 30, 1998·53 cites·50 claims
- 0484US6352082B1Ultra-low particle semiconductor cleanerSCD MOUNTAIN VIEW·Filed 1998·Granted Mar 5, 2002·49 cites·21 claims
- 0584US6158446AUltra-low particle semiconductor cleanerFSI INTERNAT·Filed 1998·Granted Dec 12, 2000·89 cites·28 claims
- 0678US5542441AApparatus for delivering ultra-low particle counts in semiconductor manufacturingYIELDUP INTERNATIONAL·Filed 1994·Granted Aug 6, 1996·49 cites·30 claims
- 0777US5932027ACleaning and drying photoresist coated wafersYIELDUP INTERNATIONAL·Filed 1998·Granted Aug 3, 1999·31 cites·31 claims
- 0875US5873947AUltra-low particle disk cleanerYIELDUP INTERNATIONAL·Filed 1997·Granted Feb 23, 1999·27 cites·43 claims
- 0974US5634978AUltra-low particle semiconductor methodYIELDUP INTERNATIONAL·Filed 1994·Granted Jun 3, 1997·56 cites·28 claims
- 1072US5958146AUltra-low particle semiconductor cleaner using heated fluidsYIELDUP INTERNATIONAL·Filed 1998·Granted Sep 28, 1999·41 cites·50 claims
- 1170US5878760AUltra-low particle semiconductor cleanerYIELDUP INTERNATIONAL·Filed 1997·Granted Mar 9, 1999·22 cites·30 claims
- 1269US5685327AUltra-low particle semiconductor apparatusYIELDUP INTERNATIONAL·Filed 1996·Granted Nov 11, 1997·32 cites·16 claims
- 1369US5651379AMethod and apparatus for delivering ultra-low particle counts in semiconductor manufacturingYIELDUP INTERNATIONAL·Filed 1995·Granted Jul 29, 1997·27 cites·29 claims
- 1466US5891256AUltra-low particle semiconductor cleanerYIELDUP INTERNATIONAL·Filed 1997·Granted Apr 6, 1999·18 cites·25 claims
- 1564US5868150AUltra-low particle semiconductor cleanerYIELDUP INTERNATIONAL·Filed 1997·Granted Feb 9, 1999·17 cites·37 claims
- 1655US6312597B1Apparatus for delivering ultra-low particle counts in semiconductor manufacturingSCD MOUNTAIN VIEW INC·Filed 1995·Granted Nov 6, 2001·16 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →