Inventor · disambiguated record
Teruo Iwasaki
Also filed as: IWASAKI TERUO
3 granted patents·73 citations·filing 1983–1991
72Inventor score
Technology areasH01J
Files withHITACHI LTD3
Top patents by PatentIndex Score
3 records- 0185US5209813ALithographic apparatus and methodHITACHI LTD·Filed 1991·Granted May 11, 1993·53 cites·55 claims
- 0258US5166529AElectron beam lithography systemHITACHI LTD·Filed 1991·Granted Nov 24, 1992·14 cites·15 claims
- 0350US4445040AShaping aperture for a charged particle forming systemHITACHI LTD·Filed 1983·Granted Apr 24, 1984·6 cites·13 claims
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