Inventor · disambiguated record
Genya Matsuoka
Also filed as: MATSUOKA GENYA
8 granted patents·184 citations·filing 1980–1994
89Inventor score
Top patents by PatentIndex Score
8 records- 0185US5209813ALithographic apparatus and methodHITACHI LTD·Filed 1991·Granted May 11, 1993·53 cites·55 claims
- 0273US5396077AElectron beam lithography apparatus having electron optics correction systemHITACHI LTD·Filed 1994·Granted Mar 7, 1995·24 cites·5 claims
- 0373US5162240AMethod and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrateHITACHI LTD·Filed 1990·Granted Nov 10, 1992·47 cites·37 claims
- 0460US4701620AElectron beam exposure apparatusHITACHI LTD·Filed 1986·Granted Oct 20, 1987·10 cites·3 claims
- 0558US5166529AElectron beam lithography systemHITACHI LTD·Filed 1991·Granted Nov 24, 1992·14 cites·15 claims
- 0656US4336597AMethod and system for measuring the diameter of an electron beamNIPPON TELEGRAPH & TELEPHONE·Filed 1980·Granted Jun 22, 1982·20 cites·9 claims
- 0751US4808829AMark position detection system for use in charged particle beam apparatusHITACHI LTD·Filed 1987·Granted Feb 28, 1989·8 cites·4 claims
- 0843US5285075AElectron beam lithography methodHITACHI LTD·Filed 1992·Granted Feb 8, 1994·8 cites·8 claims
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