Inventor · disambiguated record
Chang Uk Ahn
Also filed as: AHN CHANG UK
1 granted patent·1 pending application·0 citations·filing 2022–2022
9Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0151US12106979B2Apparatus and method for controlling temperature uniformity of substrateUNIV INDUSTRY COOPERATION GROUP KYUNG HEE UNIV·Filed 2022·Granted Oct 1, 2024·0 cites·11 claims
- 0242US2022398359A1Digital twin based temperature distribution estimating method and temperature distribution estimating apparatusUNIV INDUSTRY COOPERATION GROUP KYUNG HEE UNIV·Filed 2022·Application pending·0 cites
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