Inventor · disambiguated record
Gilles Fresquet
Also filed as: FRESQUET GILLES
12 granted patents·104 citations·filing 2002–2020
89Inventor score
Top patents by PatentIndex Score
12 records- 0196US9739600B1Chromatic confocal device and method for 2D/3D inspection of an object such as a waferFOGALE NANOTECH·Filed 2016·Granted Aug 22, 2017·33 cites·21 claims
- 0295US9494529B1Chromatic confocal device and method for 2D/3D inspection of an object such as a wafer with variable spatial resolutionFOGALE NANOTECH·Filed 2016·Granted Nov 15, 2016·22 cites·18 claims
- 0380US11662199B2Method and device for measuring interfaces of an optical elementFOGALE NANOTECH·Filed 2020·Granted May 30, 2023·2 cites·15 claims
- 0477US7033068B2Substrate processing apparatus for processing substrates using dense phase gas and sonic wavesTECHSONIC SARL·Filed 2005·Granted Apr 25, 2006·9 cites·9 claims
- 0577US6880560B2Substrate processing apparatus for processing substrates using dense phase gas and sonic wavesRECIF INC·Filed 2002·Granted Apr 19, 2005·26 cites·15 claims
- 0676US9151941B2Optical device and method for inspecting structured objectsFRESQUET GILLES·Filed 2011·Granted Oct 6, 2015·7 cites·18 claims
- 0775US9958261B2Device and method for surface profilometry for the control of wafers during processingFOGALE NANOTECH·Filed 2015·Granted May 1, 2018·2 cites·12 claims
- 0869US10240977B2Method for 2D/3D inspection of an object such as a waferFOGALE NANOTECH·Filed 2016·Granted Mar 26, 2019·1 cites·12 claims
- 0968US9897927B2Device and method for positioning a photolithography mask by a contactless optical methodFOGALE NANOTECH·Filed 2014·Granted Feb 20, 2018·2 cites·10 claims
- 1053US10074172B2Device and method for making dimensional measurements on multilayer objects such as wafersFOGALE NANOTECH·Filed 2013·Granted Sep 11, 2018·0 cites·17 claims
- 1152US10043266B2Method and device for controllably revealing structures buried in objects such as wafersFOGALE NANOTECH·Filed 2013·Granted Aug 7, 2018·0 cites·12 claims
- 1250US12163777B2Device and method for imaging and interferometry measurementsFOGALE NANOTECH·Filed 2020·Granted Dec 10, 2024·0 cites·17 claims
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