Inventor · disambiguated record

Takurou Ushida

Also filed as: USHIDA TAKUROU

1 granted patent·6 citations·filing 2015–2015

27Inventor score

Technology areasH10P

Files withHITACHI INT ELECTRIC INC1

Top patents by PatentIndex Score

1 record

0185US9816182B2Substrate processing apparatus, method for manufacturing semiconductor device, and recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted Nov 14, 2017·6 cites·10 claims

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