Inventor · disambiguated record
Hiroaki Shibue
Also filed as: SHIBUE HIROAKI
9 granted patents·1 pending application·6 citations·filing 2015–2023
77Inventor score
Files withEBARA CORP10
Top patents by PatentIndex Score
10 records- 0186US12083646B2Polishing apparatus, polishing method and method for outputting visualization information of film thickness distribution on substrateEBARA CORP·Filed 2022·Granted Sep 10, 2024·1 cites·6 claims
- 0280US9437507B2Method of correcting film thickness measurement value, film thickness corrector and eddy current sensorEBARA CORP·Filed 2015·Granted Sep 6, 2016·3 cites·17 claims
- 0375US10933507B2Polishing apparatusEBARA CORP·Filed 2017·Granted Mar 2, 2021·2 cites·10 claims
- 0472US12123714B2Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensorEBARA CORP·Filed 2023·Granted Oct 22, 2024·0 cites·3 claims
- 0569US12241738B2Detection signal processing apparatus and detection signal processing method for eddy current sensorEBARA CORP·Filed 2022·Granted Mar 4, 2025·0 cites·11 claims
- 0660US11731233B2Eddy current detection device and polishing apparatusEBARA CORP·Filed 2019·Granted Aug 22, 2023·0 cites·11 claims
- 0759US11852472B2Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensorEBARA CORP·Filed 2020·Granted Dec 26, 2023·0 cites·6 claims
- 0857US11759912B2Magnetic element and eddy current sensor using the sameEBARA CORP·Filed 2018·Granted Sep 19, 2023·0 cites·18 claims
- 0956US12179310B2Output signal processing apparatus for eddy current sensorEBARA CORP·Filed 2021·Granted Dec 31, 2024·0 cites·21 claims
- 1049US2022163484A1Eddy current sensorEBARA CORP·Filed 2021·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →