Inventor · disambiguated record
Benjamin M. Rathsack
Also filed as: RATHSACK BENJAMIN M
3 granted patents·8 citations·filing 2010–2011
62Inventor score
Top patents by PatentIndex Score
3 records- 0171US8449293B2Substrate treatment to reduce pattern roughnessRATHSACK BENJAMIN M·Filed 2010·Granted May 28, 2013·3 cites·20 claims
- 0271US8338086B2Method of slimming radiation-sensitive material lines in lithographic applicationsCARCASI MICHAEL A·Filed 2010·Granted Dec 25, 2012·3 cites·18 claims
- 0365US8435728B2Method of slimming radiation-sensitive material lines in lithographic applicationsCARCASI MICHAEL A·Filed 2011·Granted May 7, 2013·2 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →