Inventor · disambiguated record
Gon-Jun Kim
Also filed as: KIM GON-JUN
7 granted patents·12 citations·filing 2014–2022
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0186US9966274B2Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same methodSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted May 8, 2018·4 cites·19 claims
- 0281US11569065B2Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jan 31, 2023·4 cites·10 claims
- 0370US9105581B2Method of processing a substrate and apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Aug 11, 2015·3 cites·15 claims
- 0468US12456603B2Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Oct 28, 2025·0 cites·10 claims
- 0560US9685346B2Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same methodKIM GON-JUN·Filed 2015·Granted Jun 20, 2017·1 cites·17 claims
- 0652US9865474B2Etching method using plasma, and method of fabricating semiconductor device including the etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jan 9, 2018·0 cites·12 claims
- 0743US10418250B2Etching method using remote plasma source, and method of fabricating semiconductor device including the etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Sep 17, 2019·0 cites·17 claims
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