Inventor · disambiguated record

Jaap Wilhelmus Petrus Van Empel

Also filed as: VAN EMPEL JAAP WILHELMUS PETRUS

1 granted patent·0 citations·filing 2012–2012

9Inventor score

Technology areasG03F

Files withVAN BOXTEL FRANK JOHANNES JACOBUS1

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1 record

0138US8988657B2Lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Granted Mar 24, 2015·0 cites·19 claims

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