Inventor · disambiguated record
Eberhard Rauchle
Also filed as: RAEUCHLE EBERHARD
3 granted patents·67 citations·filing 1988–2000
74Inventor score
Top patents by PatentIndex Score
3 records- 0175US4939424AApparatus for producing a plasma and for the treatment of substratesLEYBOLD AG·Filed 1989·Granted Jul 3, 1990·21 cites·35 claims
- 0274US6863773B1Linearly extended device for large-surface microwave treatment and for large surface plasma productionFRAUNHOFER GES ANGEWANDTEN FOR·Filed 2000·Granted Mar 8, 2005·21 cites·24 claims
- 0366US5053244AProcess for depositing silicon oxide on a substrateLEYBOLD AG·Filed 1988·Granted Oct 1, 1991·25 cites·3 claims
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