Inventor · disambiguated record
Richard S. Hill
Also filed as: HILL RICHARD S
15 granted patents·1 pending application·654 citations·filing 2000–2020
95Inventor score
Top patents by PatentIndex Score
16 records- 0197US7166531B1VLSI fabrication processes for introducing pores into dielectric materialsNOVELLUS SYSTEMS INC·Filed 2005·Granted Jan 23, 2007·160 cites·36 claims
- 0296US8158532B2Topography reduction and control by selective accelerator removalMAYER STEVEN T·Filed 2006·Granted Apr 17, 2012·44 cites·70 claims
- 0395US8133797B2Protective layer to enable damage free gap fillVAN SCHRAVENDIJK BART·Filed 2008·Granted Mar 13, 2012·78 cites·23 claims
- 0495US7686927B1Methods and apparatus for controlled-angle wafer positioningNOVELLUS SYSTEMS INC·Filed 2006·Granted Mar 30, 2010·26 cites·7 claims
- 0595US6753250B1Method of fabricating low dielectric constant dielectric filmsNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 22, 2004·103 cites·48 claims
- 0694US7799200B1Selective electrochemical accelerator removalNOVELLUS SYSTEMS INC·Filed 2006·Granted Sep 21, 2010·21 cites·27 claims
- 0794US7727863B1Sonic irradiation during wafer immersionNOVELLUS SYSTEMS INC·Filed 2008·Granted Jun 1, 2010·33 cites·25 claims
- 0893US8470191B2Topography reduction and control by selective accelerator removalMAYER STEVEN T·Filed 2007·Granted Jun 25, 2013·19 cites·10 claims
- 0993US6500321B1Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering targetNOVELLUS SYSTEMS INC·Filed 2000·Granted Dec 31, 2002·47 cites·30 claims
- 1092US6995439B1Method of fabricating low dielectric constant dielectric filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Feb 7, 2006·62 cites·9 claims
- 1186US7097410B1Methods and apparatus for controlled-angle wafer positioningNOVELLUS SYSTEMS INC·Filed 2003·Granted Aug 29, 2006·28 cites·10 claims
- 1285US7629224B1VLSI fabrication processes for introducing pores into dielectric materialsNOVELLUS SYSTEMS INC·Filed 2006·Granted Dec 8, 2009·19 cites·13 claims
- 1384US8268154B1Selective electrochemical accelerator removalMAYER STEVEN T·Filed 2010·Granted Sep 18, 2012·5 cites·15 claims
- 1473US8795482B1Selective electrochemical accelerator removalMAYER STEVEN T·Filed 2012·Granted Aug 5, 2014·2 cites·16 claims
- 1569US7972976B1VLSI fabrication processes for introducing pores into dielectric materialsNOVELLUS SYSTEMS INC·Filed 2009·Granted Jul 5, 2011·7 cites·15 claims
- 1652US2021063317A1Detection of defects on metal surfacesUNIV ILLINOIS·Filed 2020·Application pending·0 cites
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