Inventor · disambiguated record

Jeffrey A. Burgess

Also filed as: BURGESS JEFFREY A

5 granted patents·19 citations·filing 2000–2017

72Inventor score

Technology areasH01J H10P

Files withVARIAN SEMICONDUCTOR EQUIPMENT2 VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 AXCELIS TECH INC1

Top patents by PatentIndex Score

5 records

0170US6525326B1System and method for removing particles entrained in an ion beamAXCELIS TECH INC·Filed 2000·Granted Feb 25, 2003·15 cites·27 claims
0267US7559557B2Sealing between vacuum chambersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jul 14, 2009·2 cites·22 claims
0355US10153127B1Low profile extraction electrode assemblyVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Dec 11, 2018·0 cites·18 claims
0452US6984831B2Gas flow restricting cathode system for ion implanter and related methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Jan 10, 2006·2 cites·21 claims
0551US9818575B2Low profile extraction electrode assemblyVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Nov 14, 2017·0 cites·3 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →