Inventor · disambiguated record
Noburu Takakura
Also filed as: TAKAKURA NOBURU
12 granted patents·1 pending application·177 citations·filing 1993–2024
88Inventor score
Top patents by PatentIndex Score
13 records- 0192US5543921AAligning method utilizing reliability weighting coefficientsCANON KK·Filed 1995·Granted Aug 6, 1996·96 cites·13 claims
- 0289US6333786B1Aligning methodCANON KK·Filed 1993·Granted Dec 25, 2001·60 cites·2 claims
- 0388US11061335B2Information processing apparatus, storage medium, lithography apparatus, lithography system, and article manufacturing methodCANON KK·Filed 2019·Granted Jul 13, 2021·3 cites·27 claims
- 0477US8305555B2Exposure apparatus, exposure method, and device manufacturing methodKOGA SHINICHIRO·Filed 2010·Granted Nov 6, 2012·4 cites·10 claims
- 0577US2025029276A1Measurement apparatus that measures position information of measurement target in predetermined directionCANON KK·Filed 2024·Application pending·0 cites
- 0669US9423700B2Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing methodCANON KK·Filed 2014·Granted Aug 23, 2016·1 cites·13 claims
- 0766US12148181B2Measurement apparatus that measures position information of measurement target in predetermined directionCANON KK·Filed 2021·Granted Nov 19, 2024·0 cites·25 claims
- 0859US12307643B2Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatusCANON KK·Filed 2021·Granted May 20, 2025·0 cites·25 claims
- 0955US6097495AAligning methodCANON KK·Filed 1998·Granted Aug 1, 2000·13 cites·6 claims
- 1054US9880475B2Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing methodCANON KK·Filed 2016·Granted Jan 30, 2018·0 cites·11 claims
- 1147US10754257B2Method of manufacturing pattern and article manufacturing methodCANON KK·Filed 2019·Granted Aug 25, 2020·0 cites·13 claims
- 1238US10372033B2Imprint apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted Aug 6, 2019·0 cites·20 claims
- 1323US10359711B2Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing methodCANON KK·Filed 2015·Granted Jul 23, 2019·0 cites·6 claims
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