Inventor · disambiguated record
Tienyu Sheng
Also filed as: SHENG TIENYU · SHENG TIENYU T · SHENG TIENYU TERRY
4 granted patents·4 pending applications·202 citations·filing 1995–2016
75Inventor score
Top patents by PatentIndex Score
8 records- 0192US5711812AApparatus for obtaining dose uniformity in plasma doping (PLAD) ion implantation processesVARIAN ASSOCIATES·Filed 1995·Granted Jan 27, 1998·192 cites·8 claims
- 0269US9653253B2Plasma-based material modification using a plasma source with magnetic confinementADVANCED ION BEAM TECH INC·Filed 2014·Granted May 16, 2017·2 cites·32 claims
- 0352US7687784B2Method and device of ion source generationADVANCED ION BEAM TECHNOLOGY I·Filed 2008·Granted Mar 30, 2010·0 cites·16 claims
- 0439US6132513AProcess chemistry resistant manometerLAM RES CORP·Filed 1999·Granted Oct 17, 2000·8 cites·18 claims
- 0535US2017069467A1Plasma-based processing system and operation method thereofADVANCED ION BEAM TECH INC·Filed 2016·Application pending·0 cites
- 0633US2016076142A1Deposition Apparatus and Deposition Method Using the SameADVANCED ION BEAM TECH INC·Filed 2015·Application pending·0 cites
- 0733US2016233047A1Plasma-based material modification with neutral beamADVANCED ION BEAM TECH INC·Filed 2016·Application pending·0 cites
- 0829US2016203950A1Method and ion implanter for low temperature implantationADVANCED ION BEAM TECH INC·Filed 2015·Application pending·0 cites
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