Inventor · disambiguated record
Wilhelmus Franciscus Johannes Simons
Also filed as: SIMONS WILHELMUS · SIMONS WILHELMUS FRANCISCUS JO · SIMONS WILHELMUS FRANCISCUS JOHANNES
24 granted patents·230 citations·filing 1990–2018
95Inventor score
Files withASML NETHERLANDS BV14HEERTJES MARCEL FRANCOIS2ASEA BROWN BOVERI1BERKVENS PAUL PETRUS JOANNES1DIRECKS DANIEL JOZEF MARIA1
Top patents by PatentIndex Score
24 records- 0198US7710540B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted May 4, 2010·94 cites·24 claims
- 0290US8634053B2Lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2007·Granted Jan 21, 2014·12 cites·27 claims
- 0389US9785055B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·7 cites·20 claims
- 0487US10222707B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Mar 5, 2019·3 cites·20 claims
- 0587US7561250B2Lithographic apparatus having parts with a coated film adhered theretoASML NETHERLANDS BV·Filed 2007·Granted Jul 14, 2009·9 cites·36 claims
- 0686US9915877B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Mar 13, 2018·3 cites·20 claims
- 0786US8259283B2Immersion lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Sep 4, 2012·10 cites·24 claims
- 0879US7630059B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Dec 8, 2009·5 cites·16 claims
- 0977US9927721B2Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 27, 2018·2 cites·20 claims
- 1076US8472003B2Fluid handling structure, lithographic apparatus and device manufacturing methodPATEL HRISHIKESH·Filed 2010·Granted Jun 25, 2013·5 cites·24 claims
- 1173US5273462AConnector keying systemASEA BROWN BOVERI·Filed 1990·Granted Dec 28, 1993·41 cites·18 claims
- 1272US7205741B2Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 17, 2007·27 cites·10 claims
- 1370US8825182B2Position control system, lithographic apparatus, and method to control a position of a movable objectSIMONS WILHELMUS FRANCISCUS JOHANNES·Filed 2011·Granted Sep 2, 2014·3 cites·16 claims
- 1469US7948609B2Lithographic apparatus, stage system and stage control methodASML NETHERLANDS BV·Filed 2008·Granted May 24, 2011·3 cites·12 claims
- 1564US8135488B2Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceHEERTJES MARCEL FRANCOIS·Filed 2008·Granted Mar 13, 2012·2 cites·13 claims
- 1663US10248027B2Projection systemASML NETHERLANDS BV·Filed 2015·Granted Apr 2, 2019·1 cites·21 claims
- 1762US8913228B2Lithographic apparatus and device manufacturing methodWIJCKMANS MAURICE·Filed 2007·Granted Dec 16, 2014·2 cites·39 claims
- 1860US10481502B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·0 cites·20 claims
- 1960US10268127B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 23, 2019·0 cites·20 claims
- 2059US9645506B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 2155US8681308B2Lithographic apparatus and device manufacturing methodBERKVENS PAUL PETRUS JOANNES·Filed 2007·Granted Mar 25, 2014·1 cites·22 claims
- 2253US8452442B2Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceHEERTJES MARCEL FRANCOIS·Filed 2012·Granted May 28, 2013·0 cites·18 claims
- 2349US9274436B2Lithographic apparatus and a device manufacturing methodPOLET THEODORUS WILHELMUS·Filed 2012·Granted Mar 1, 2016·0 cites·21 claims
- 2446US10962890B2Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Mar 30, 2021·0 cites·15 claims
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