Inventor · disambiguated record
Jeroen Thomas Broekhuijse
Also filed as: BROEKHUIJSE JEROEN THOMAS
2 granted patents·0 citations·filing 2004–2010
23Inventor score
Top patents by PatentIndex Score
2 records- 0135US7280228B2System and method of measurement, system and method of alignment, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2004·Granted Oct 9, 2007·0 cites·26 claims
- 0232US8395772B2Sensor, a table and lithographic apparatusVAN BUEL HENRICUS WILHELMUS MARIA·Filed 2010·Granted Mar 12, 2013·0 cites·20 claims
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