Inventor · disambiguated record
Marcus Theodoor Wilhelmus Van Der Heijden
Also filed as: VAN DER HEIJDEN MARCUS THEODOO · VAN DER HEIJDEN MARCUS THEODOOR · VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS
5 granted patents·2 pending applications·16 citations·filing 2006–2012
71Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS3DE LAAT WILHELMUS JOHANNES MARIA1
Top patents by PatentIndex Score
7 records- 0186US8114568B2Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatusVAN DER HEIJDEN MARCUS THEODOOR WILHELMUS·Filed 2008·Granted Feb 14, 2012·12 cites·31 claims
- 0277US7349071B2Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 25, 2008·4 cites·19 claims
- 0350US8394572B2Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatusVAN DER HEIJDEN MARCUS THEODOOR WILHELMUS·Filed 2012·Granted Mar 12, 2013·0 cites·20 claims
- 0442US9383195B2Lithographic apparatus and methodDE LAAT WILHELMUS JOHANNES MARIA·Filed 2008·Granted Jul 5, 2016·0 cites·21 claims
- 0542US2009014030A1Substrates and methods of using those substratesASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 0641US2009115979A1Immersion lithography apparatusASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 0738US8648997B2Member with a cleaning surface and a method of removing contaminationVAN DER HEIJDEN MARCUS THEODOOR WILHELMUS·Filed 2009·Granted Feb 11, 2014·0 cites·23 claims
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