Inventor · disambiguated record
Kenneth W. Cowans
Also filed as: COWANS KENNETH W · COWANS KENNETH WESLEY
52 granted patents·1 pending application·2,217 citations·filing 1971–2019
99Inventor score
Files withCOWANS KENNETH W10ADVANCED THERMAL SCIENCES CORP8B E AEROSPACE6BE AEROSPACE INC6ADVANCED THERMAL SCIENCES5
Top patents by PatentIndex Score
53 records- 0199US7442275B2Lateral temperature equalizing system for large area surfaces during processingADVANCED THERMAL SCIENCES·Filed 2006·Granted Oct 28, 2008·545 cites·6 claims
- 0299US7195693B2Lateral temperature equalizing system for large area surfaces during processingADVANCED THERMAL SCIENCES·Filed 2003·Granted Mar 27, 2007·549 cites·5 claims
- 0398US7415835B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2006·Granted Aug 26, 2008·119 cites·8 claims
- 0498US7178353B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2005·Granted Feb 20, 2007·79 cites·30 claims
- 0596US8092639B2Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changesBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Jan 10, 2012·20 cites·7 claims
- 0695US7765820B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2008·Granted Aug 3, 2010·29 cites·36 claims
- 0793US8329586B2Method of processing a workpiece in a plasma reactor using feed forward thermal controlBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Dec 11, 2012·11 cites·18 claims
- 0893US8221580B2Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loopsBUCHBERGER JR DOUGLAS A·Filed 2006·Granted Jul 17, 2012·14 cites·18 claims
- 0992US8980044B2Plasma reactor with a multiple zone thermal control feed forward control apparatusBRILLHART PAUL LUKAS·Filed 2010·Granted Mar 17, 2015·10 cites·19 claims
- 1092US8337660B2Capacitively coupled plasma reactor having very agile wafer temperature controlBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Dec 25, 2012·12 cites·13 claims
- 1192US8021521B2Method for agile workpiece temperature control in a plasma reactor using a thermal modelAPPLIED MATERIALS INC·Filed 2006·Granted Sep 20, 2011·13 cites·19 claims
- 1292US7661460B1Heat exchangers for fluid mediaADVANCED THERMAL SCIENCES CORP·Filed 2004·Granted Feb 16, 2010·66 cites·5 claims
- 1391US7988872B2Method of operating a capacitively coupled plasma reactor with dual temperature control loopsAPPLIED MATERIALS INC·Filed 2006·Granted Aug 2, 2011·19 cites·20 claims
- 1491US5471850ARefrigeration system and method for very large scale integrated circuitsACUREX CORP·Filed 1994·Granted Dec 5, 1995·125 cites·24 claims
- 1590US6775996B2Systems and methods for temperature controlADVANCED THERMAL SCIENCES CORP·Filed 2002·Granted Aug 17, 2004·51 cites·17 claims
- 1689US7152426B1Thermal control systems for process tools requiring operation over wide temperature rangesADVANCED THERMAL SCIENCES·Filed 2005·Granted Dec 26, 2006·15 cites·3 claims
- 1788US8453468B1System and method for thermal control of different heat loads from a single source of saturated fluidsCOWANS KENNETH W·Filed 2010·Granted Jun 4, 2013·9 cites·13 claims
- 1887US9360243B1Temperature control system and method TDSF plusCOWANS KENNETH W·Filed 2011·Granted Jun 7, 2016·5 cites·19 claims
- 1987US8546267B2Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal controlBRILLHART PAUL LUKAS·Filed 2010·Granted Oct 1, 2013·5 cites·7 claims
- 2087US7337625B1Thermal control systems for process tools requiring operation over wide temperature rangesADVANCED THERMAL SCIENCES·Filed 2006·Granted Mar 4, 2008·12 cites·3 claims
- 2187US4340778ASpeaker distortion compensatorBENNETT SOUND CORP·Filed 1979·Granted Jul 20, 1982·70 cites·32 claims
- 2283US4004421AFluid engineKETOBI ASSOCIATES·Filed 1971·Granted Jan 25, 1977·38 cites·15 claims
- 2382US8801893B2Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactorBRILLHART PAUL LUKAS·Filed 2010·Granted Aug 12, 2014·5 cites·16 claims
- 2480US6102113ATemperature control of individual tools in a cluster tool systemB E AEROSPACE·Filed 1997·Granted Aug 15, 2000·49 cites·23 claims
- 2580US4294242ASurvival systemKINERGETICS INC·Filed 1980·Granted Oct 13, 1981·55 cites·13 claims
- 2679US8291719B2Thermal control system and methodCOWANS WILLIAM W·Filed 2008·Granted Oct 23, 2012·7 cites·12 claims
- 2778US9372020B2Method and apparatus for thermal exchange with two-phase mediaBE AEROSPACE INC·Filed 2013·Granted Jun 21, 2016·2 cites·3 claims
- 2878US4549146ASystems and methods for compensating for element nonlinearities in electronic circuitsCOWANS KENNETH W·Filed 1983·Granted Oct 22, 1985·20 cites·10 claims
- 2977US8532832B2Method and apparatus for thermal exchange with two-phase mediaCOWANS KENNETH W·Filed 2009·Granted Sep 10, 2013·4 cites·19 claims
- 3076US6814064B2High efficiency engine with variable compression ratio and charge (VCRC engine)Filed 2003·Granted Nov 9, 2004·15 cites·4 claims
- 3176US6499535B2Temperature control of individual tools in a cluster tool systemB E AEROSPACE·Filed 2001·Granted Dec 31, 2002·20 cites·4 claims
- 3274US7243500B2Heat exchanger and temperature control unitADVANCED THERMAL SCIENCES CORP·Filed 2005·Granted Jul 17, 2007·4 cites·16 claims
- 3372US5802863ASystem and method for refrigerating liquidsBE AEROSPACE INC·Filed 1995·Granted Sep 8, 1998·39 cites·13 claims
- 3471US11154073B1Temperature control system and method TDSF plusBE AEROSPACE INC·Filed 2019·Granted Oct 26, 2021·0 cites·6 claims
- 3571US8240160B2Thermal control system and methodCOWANS KENNETH W·Filed 2009·Granted Aug 14, 2012·4 cites·4 claims
- 3670US6626649B2Pump system employing liquid filled rotorADVANCED THERMAL SCIENCES CORP·Filed 2001·Granted Sep 30, 2003·17 cites·29 claims
- 3768US6993918B1Thermal control systems for process tools requiring operation over wide temperature rangesADVANCED THERMAL SCIENCES·Filed 2004·Granted Feb 7, 2006·15 cites·11 claims
- 3865US6708654B2High efficiency engine with variable compression ratio and charge (VCRC engine)Filed 2001·Granted Mar 23, 2004·10 cites·37 claims
- 3963US6247531B1Temperature control of individual tools in a cluster tool systemB E AEROSPACE·Filed 2000·Granted Jun 19, 2001·10 cites·13 claims
- 4062US10386101B2Method and apparatus for thermal exchange with two-phase mediaBE AEROSPACE INC·Filed 2016·Granted Aug 20, 2019·0 cites·4 claims
- 4162US10342241B2Temperature control system and method TDSF plusBE AEROSPACE INC·Filed 2016·Granted Jul 9, 2019·0 cites·6 claims
- 4262US6209334B1Systems and methods for capacity regulation of refrigeration systemsB E AEROSPACE·Filed 2000·Granted Apr 3, 2001·15 cites·3 claims
- 4362US6068455ALong life pump systemB E AEROSPACE·Filed 1997·Granted May 30, 2000·27 cites·8 claims
- 4459US9435255B2VCRC engine with insulated chambersCOWANS KENNETH W·Filed 2014·Granted Sep 6, 2016·0 cites·17 claims
- 4559US9416723B2Air supply concepts to improve efficiency of VCRC enginesCOWANS KENNETH W·Filed 2014·Granted Aug 16, 2016·0 cites·8 claims
- 4659US6109047ASystems and methods for capacity regulation of refrigeration systemsB E AEROSPACE·Filed 1998·Granted Aug 29, 2000·23 cites·26 claims
- 4758US4426552ASpeaker distortion compensatorCOWANS KENNETH W·Filed 1982·Granted Jan 17, 1984·24 cites·18 claims
- 4857US4622660ASystems and methods for signal compensationCOWANS KENNETH W·Filed 1985·Granted Nov 11, 1986·11 cites·30 claims
- 4955US8689575B2Thermal control system and methodCOWANS WILLIAM W·Filed 2012·Granted Apr 8, 2014·0 cites·7 claims
- 5052US10168086B2Temperature control system with programmable ORIT valveBE AEROSPACE INC·Filed 2014·Granted Jan 1, 2019·0 cites·8 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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