Inventor · disambiguated record
Hiromichi Hara
Also filed as: HARA HIROMICHI
17 granted patents·1 pending application·235 citations·filing 1975–2019
94Inventor score
Top patents by PatentIndex Score
18 records- 0180US6493062B2Driving apparatus and exposure apparatusCANON KK·Filed 1999·Granted Dec 10, 2002·61 cites·57 claims
- 0278US4083834AProcess for producing polymer having functional groups at its chain terminalsJAPAN SYNTHETIC RUBBER CO LTD·Filed 1975·Granted Apr 11, 1978·19 cites·21 claims
- 0376US7227617B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Jun 5, 2007·4 cites·7 claims
- 0475US6623907B2Radiation-sensitive resin compositionJSR CORP·Filed 2001·Granted Sep 23, 2003·35 cites·12 claims
- 0575US6512571B2Anti-vibration system for exposure apparatusCANON KK·Filed 1999·Granted Jan 28, 2003·31 cites·8 claims
- 0675US5881987AVibration damping apparatusCANON KK·Filed 1997·Granted Mar 16, 1999·36 cites·14 claims
- 0767US6899989B2Radiation-sensitive resin compositionJSR CORP·Filed 2001·Granted May 31, 2005·8 cites·21 claims
- 0865US7944546B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2009·Granted May 17, 2011·2 cites·12 claims
- 0964US6885431B2Exposure apparatus and method of manufacturing a semiconductor device using the sameCANON KK·Filed 2003·Granted Apr 26, 2005·9 cites·15 claims
- 1063US6897939B2Exposure apparatusCANON KK·Filed 2003·Granted May 24, 2005·8 cites·7 claims
- 1162US7821617B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Oct 26, 2010·1 cites·25 claims
- 1261US6914663B2Exposure apparatusCANON KK·Filed 2003·Granted Jul 5, 2005·5 cites·13 claims
- 1359US6862077B2Anti-vibration system for exposure apparatusCANON KK·Filed 2002·Granted Mar 1, 2005·4 cites·8 claims
- 1457US7060414B2Radiation-sensitive resin compositionJSR CORP·Filed 2005·Granted Jun 13, 2006·4 cites·2 claims
- 1556US10481509B2Vibration damping apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2019·Granted Nov 19, 2019·0 cites·25 claims
- 1653US8780329B2Exposure apparatus, structure, method for setting up apparatus, and device manufacturing method having filling member formed by hardening liquid to support setting legHARA HIROMICHI·Filed 2008·Granted Jul 15, 2014·2 cites·7 claims
- 1749US2010079736A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 1840US6048659ARadiation-sensitive resin compositionJSR CORP·Filed 1998·Granted Apr 11, 2000·6 cites·20 claims
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