Inventor · disambiguated record
Sukeyoshi Tsunekawa
Also filed as: TSUNEKAWA SUKEYOSHI
18 granted patents·649 citations·filing 1982–2005
95Inventor score
Top patents by PatentIndex Score
18 records- 0197US4717462ASputtering apparatusHITACHI LTD·Filed 1986·Granted Jan 5, 1988·102 cites·11 claims
- 0295US4599135AThin film depositionHITACHI LTD·Filed 1984·Granted Jul 8, 1986·82 cites·28 claims
- 0393US6537461B1Process for treating solid surface and substrate surfaceHITACHI LTD·Filed 2000·Granted Mar 25, 2003·60 cites·9 claims
- 0490US6607988B2Manufacturing method of semiconductor integrated circuit deviceHITACHI LTD·Filed 2000·Granted Aug 19, 2003·53 cites·10 claims
- 0590US6326218B1Semiconductor integrated circuit and its manufacturing methodHITACHI LTD·Filed 2000·Granted Dec 4, 2001·46 cites·6 claims
- 0685US6451665B1Method of manufacturing a semiconductor integrated circuitHITACHI LTD·Filed 1999·Granted Sep 17, 2002·66 cites·8 claims
- 0782US5503708AMethod of and apparatus for removing an organic filmHITACHI LTD·Filed 1993·Granted Apr 2, 1996·91 cites·10 claims
- 0875US7264677B2Process for treating solid surface and substrate surfaceRENESAS TECH CORP·Filed 2005·Granted Sep 4, 2007·3 cites·11 claims
- 0974US6613242B2Process for treating solid surface and substrate surfaceHITACHI LTD·Filed 2001·Granted Sep 2, 2003·12 cites·16 claims
- 1074US4792842ASemiconductor device with wiring layer using bias sputteringHITACHI LTD·Filed 1987·Granted Dec 20, 1988·44 cites·21 claims
- 1172US5478401AApparatus and method for surface treatmentHITACHI LTD·Filed 1995·Granted Dec 26, 1995·47 cites·16 claims
- 1268US6821446B2Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubingHITACHI LTD·Filed 2001·Granted Nov 23, 2004·5 cites·11 claims
- 1365US5747387ARemoval method of organic matter and system for the sameHITACHI LTD·Filed 1995·Granted May 5, 1998·34 cites·8 claims
- 1451US6664184B2Method for manufacturing semiconductor device having an etching treatmentHITACHI LTD·Filed 2002·Granted Dec 16, 2003·3 cites·8 claims
- 1543US7645509B2Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubingHITACHI LTD·Filed 2004·Granted Jan 12, 2010·0 cites·6 claims
- 1643US7025896B2Process for treating solid surface and substrate surfaceRENESAS TECH CORP·Filed 2003·Granted Apr 11, 2006·0 cites·26 claims
- 1742US7419577B2Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubingHITACHI LTD·Filed 2003·Granted Sep 2, 2008·0 cites·2 claims
- 1833US4394245ASputtering apparatusHITACHI LTD·Filed 1982·Granted Jul 19, 1983·1 cites·11 claims
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