Inventor · disambiguated record
Takashi Yunogami
Also filed as: YUNOGAMI TAKASHI
25 granted patents·797 citations·filing 1990–2008
97Inventor score
Top patents by PatentIndex Score
25 records- 0198US5284544AApparatus for and method of surface treatment for microelectronic devicesHITACHI LTD·Filed 1990·Granted Feb 8, 1994·173 cites·53 claims
- 0293US6537461B1Process for treating solid surface and substrate surfaceHITACHI LTD·Filed 2000·Granted Mar 25, 2003·60 cites·9 claims
- 0390US6607988B2Manufacturing method of semiconductor integrated circuit deviceHITACHI LTD·Filed 2000·Granted Aug 19, 2003·53 cites·10 claims
- 0490US6340632B1Method of manufacturing a semiconductor deviceHITACHI LTD·Filed 2000·Granted Jan 22, 2002·44 cites·37 claims
- 0590US6326218B1Semiconductor integrated circuit and its manufacturing methodHITACHI LTD·Filed 2000·Granted Dec 4, 2001·46 cites·6 claims
- 0687US6756262B1Semiconductor integrated circuit device having spaced-apart electrodes and the method thereofHITACHI LTD·Filed 2000·Granted Jun 29, 2004·46 cites·13 claims
- 0786US6506674B2Method of manufacturing a semiconductor integrated circuit deviceHITACHI LTD·Filed 2001·Granted Jan 14, 2003·37 cites·35 claims
- 0886US6497992B1Process for manufacturing semiconductor integrated circuit deviceHITACHI LTD·Filed 2000·Granted Dec 24, 2002·32 cites·7 claims
- 0985US6451665B1Method of manufacturing a semiconductor integrated circuitHITACHI LTD·Filed 1999·Granted Sep 17, 2002·66 cites·8 claims
- 1083US7419902B2Method of manufacture of semiconductor integrated circuitRENESAS TECH CORP·Filed 2005·Granted Sep 2, 2008·8 cites·44 claims
- 1183US6555464B2Semiconductor device and method of manufacturing the sameHITACHI LTD·Filed 2002·Granted Apr 29, 2003·25 cites·21 claims
- 1279US6057081AProcess for manufacturing semiconductor integrated circuit deviceHITACHI LTD·Filed 1997·Granted May 2, 2000·50 cites·60 claims
- 1378US6426255B1Process for making a semiconductor integrated circuit device having a dynamic random access memoryHITACHI LTD·Filed 2000·Granted Jul 30, 2002·23 cites·38 claims
- 1477US7737023B2Method of manufacture of semiconductor integrated circuit device and semiconductor integrated circuit deviceRENESAS TECH CORP·Filed 2008·Granted Jun 15, 2010·5 cites·27 claims
- 1575US7264677B2Process for treating solid surface and substrate surfaceRENESAS TECH CORP·Filed 2005·Granted Sep 4, 2007·3 cites·11 claims
- 1674US6613242B2Process for treating solid surface and substrate surfaceHITACHI LTD·Filed 2001·Granted Sep 2, 2003·12 cites·16 claims
- 1769US6458602B1Method for fabricating semiconductor integrated circuit deviceHITACHI LTD·Filed 2000·Granted Oct 1, 2002·14 cites·20 claims
- 1867US6998325B2Method for manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2004·Granted Feb 14, 2006·11 cites·10 claims
- 1965US6528400B2Method of manufacturing a semiconductor deviceHITACHI LTD·Filed 2001·Granted Mar 4, 2003·8 cites·18 claims
- 2063US5314839ASolid state device fabrication method including a surface treatment step with a neutral particle beam with an energy between 10ev and 100evHITACHI LTD·Filed 1991·Granted May 24, 1994·37 cites·45 claims
- 2161US6432835B1Process for fabricating an integrated circuit device having a capacitor with an electrode formed at a high aspect ratioHITACHI LTD·Filed 1999·Granted Aug 13, 2002·25 cites·20 claims
- 2255US6774020B2Semiconductor device and method of manufacturing the sameRENESAS TECH CORP·Filed 2003·Granted Aug 10, 2004·4 cites·21 claims
- 2343US7025896B2Process for treating solid surface and substrate surfaceRENESAS TECH CORP·Filed 2003·Granted Apr 11, 2006·0 cites·26 claims
- 2442US5115130ASurface measuring method and apparatusHITACHI LTD·Filed 1990·Granted May 19, 1992·9 cites·30 claims
- 2534US5241186ASurface treatment method and apparatus thereforHITACHI LTD·Filed 1990·Granted Aug 31, 1993·6 cites·68 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →