Inventor · disambiguated record
Akiyuki Minami
Also filed as: MINAMI AKIYUKI
12 granted patents·1 pending application·52 citations·filing 1998–2017
89Inventor score
Top patents by PatentIndex Score
13 records- 0171US10680068B2Semiconductor substrateSICOXS CORP·Filed 2017·Granted Jun 9, 2020·2 cites·16 claims
- 0269US6440262B1Resist mask having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor waferOKI ELECTRIC IND CO LTD·Filed 2002·Granted Aug 27, 2002·10 cites·14 claims
- 0368US9761479B2Manufacturing method for semiconductor substrateTOYOTA JIDOSHOKKI KK·Filed 2014·Granted Sep 12, 2017·2 cites·16 claims
- 0463US9773678B2Semiconductor substrate and method for manufacturing semiconductor substrateTOYOTA JIDOSHOKKI KK·Filed 2015·Granted Sep 26, 2017·1 cites·19 claims
- 0561US6589385B2Resist mask for measuring the accuracy of overlaid layersOKI ELECTRIC IND CO LTD·Filed 2002·Granted Jul 8, 2003·6 cites·18 claims
- 0659US6601314B2Method of manufacturing alignment markOKI ELECTRIC IND CO LTD·Filed 2002·Granted Aug 5, 2003·9 cites·13 claims
- 0757US7804127B2Semiconductor non-volatile memory having semiconductor non-volatile memory cell with electric charge accumulation layer, and method of producing the sameOKI ELECTRIC IND CO LTD·Filed 2008·Granted Sep 28, 2010·2 cites·8 claims
- 0852US6757049B2Apparatus and method for exposureOKI ELECTRIC IND CO LTD·Filed 2002·Granted Jun 29, 2004·3 cites·6 claims
- 0949US6559063B2Method for manufacturing semiconductor wafer having resist mask with measurement marks for measuring the accuracy of overlay of a photomaskOKI ELECTRIC IND CO LTD·Filed 2002·Granted May 6, 2003·2 cites·4 claims
- 1043US6368980B1Resist mark having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer and method for manufacturing semiconductor wafer having itOKI ELECTRIC IND CO LTD·Filed 1999·Granted Apr 9, 2002·7 cites·6 claims
- 1140US6562188B2Resist mask for measuring the accuracy of overlaid layersOKI ELECTRIC IND CO LTD·Filed 2002·Granted May 13, 2003·0 cites·19 claims
- 1240US6140711AAlignment marks of semiconductor substrate and manufacturing method thereofOKI ELECTRIC IND CO LTD·Filed 1998·Granted Oct 31, 2000·8 cites·11 claims
- 1339US2006109464A1Method for detecting alignment accuracyMINAMI AKIYUKI·Filed 2005·Application pending·0 cites
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