Inventor · disambiguated record

Marco Ahrens

Also filed as: AHRENS MARCO

2 granted patents·16 citations·filing 2001–2004

51Inventor score

Technology areasG03F

Files withINFINEON TECHNOLOGIES AG2

Top patents by PatentIndex Score

2 records

0173US6664010B2OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask and associated device and integrated circuit configurationINFINEON TECHNOLOGIES AG·Filed 2001·Granted Dec 16, 2003·16 cites·16 claims
0236US7354683B2Lithography mask for imaging of convex structuresINFINEON TECHNOLOGIES AG·Filed 2004·Granted Apr 8, 2008·0 cites·30 claims

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