Inventor · disambiguated record
Michael Arnz
Also filed as: ARNZ MICHAEL
20 granted patents·1 pending application·76 citations·filing 2002–2017
92Inventor score
Top patents by PatentIndex Score
21 records- 0184US6816247B1Moiré method and a system for measuring the distortion of an optical imaging systemZEISS CARL SMT AG·Filed 2002·Granted Nov 9, 2004·36 cites·22 claims
- 0281US8457411B2Method and device for determining the position of an edge of a marker structure with subpixel accuracy in an image, having a plurality of pixels, of the marker structureARNZ MICHAEL·Filed 2010·Granted Jun 4, 2013·4 cites·22 claims
- 0378US7755748B2Device and method for range-resolved determination of scattered light, and an illumination maskZEISS CARL SMT AG·Filed 2008·Granted Jul 13, 2010·4 cites·26 claims
- 0474US8694929B2Method and apparatus for the position determination of structures on a mask for microlithographySEIDEL DIRK·Filed 2012·Granted Apr 8, 2014·6 cites·16 claims
- 0573US10012911B2Projection exposure apparatus with wavefront measuring device and optical wavefront manipulatorZEISS CARL SMT GMBH·Filed 2017·Granted Jul 3, 2018·1 cites·20 claims
- 0671US8218148B2Method and apparatus for measuring scattered light on an optical systemARNZ MICHAEL·Filed 2010·Granted Jul 10, 2012·2 cites·23 claims
- 0769US7408631B2Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field maskZEISS CARL SMT AG·Filed 2004·Granted Aug 5, 2008·9 cites·25 claims
- 0868US9297994B2Grating-assisted autofocus device and autofocusing method for an imaging devicePERLITZ SASCHA·Filed 2012·Granted Mar 29, 2016·3 cites·31 claims
- 0968US8473237B2Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stageHUEBEL ALEXANDER·Filed 2010·Granted Jun 25, 2013·4 cites·28 claims
- 1066US8260033B2Method and apparatus for determining the relative overlay shift of stacked layersARNZ MICHAEL·Filed 2008·Granted Sep 4, 2012·2 cites·11 claims
- 1163US8693805B2Determination of the relative position of two structuresARNZ MICHAEL·Filed 2010·Granted Apr 8, 2014·1 cites·21 claims
- 1260US9786046B2Method and device for determining a lateral offset of a pattern on a substrate relative to a desired positionZEISS CARL SMT GMBH·Filed 2015·Granted Oct 10, 2017·1 cites·20 claims
- 1355US9377415B2Measuring device for measuring an illumination propertyZEISS CARL SMT GMBH·Filed 2014·Granted Jun 28, 2016·0 cites·15 claims
- 1454US10113864B2Method for determining the registration of a structure on a photomask and apparatus to perform the methodZEISS CARL SMT GMBH·Filed 2016·Granted Oct 30, 2018·0 cites·20 claims
- 1551US9303975B2Method for determining the registration of a structure on a photomask and apparatus to perform the methodARNZ MICHAEL·Filed 2011·Granted Apr 5, 2016·0 cites·46 claims
- 1651US9229209B2Autofocus device and autofocusing method for an imaging deviceARNZ MICHAEL·Filed 2009·Granted Jan 5, 2016·2 cites·76 claims
- 1751US8369605B2Method and apparatus for determining the position of a structure on a carrier relative to a reference point of the carrierZEISS CARL SMS GMBH·Filed 2007·Granted Feb 5, 2013·1 cites·22 claims
- 1849US8731273B2Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by sectionARNZ MICHAEL·Filed 2009·Granted May 20, 2014·0 cites·26 claims
- 1945US2010153059A1Apparatus and method for measuring the positions of marks on a maskKLOSE GERD·Filed 2008·Application pending·0 cites
- 2043US9797805B2Test object for measuring the point spread function of an optical systemZEISS CARL SMT GMBH·Filed 2015·Granted Oct 24, 2017·0 cites·16 claims
- 2142US9014505B2Method and device for determining the position of a first structure relative to a second structure or a part thereofARNZ MICHAEL·Filed 2012·Granted Apr 21, 2015·0 cites·20 claims
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