Inventor · disambiguated record
Waki Ohkubo
Also filed as: OHKUBO WAKI
5 granted patents·304 citations·filing 1999–2006
80Inventor score
Files withTOKYO OHKA KOGYO CO LTD5
Top patents by PatentIndex Score
5 records- 0196US6153733A(Disulfonyl diazomethane compounds)TOKYO OHKA KOGYO CO LTD·Filed 1999·Granted Nov 28, 2000·254 cites·6 claims
- 0289US6180313B1Poly (disulfonyl diazomethane) compound and positive-working chemical-amplification photoresist composition containing the sameTOKYO OHKA KOGYO CO LTD·Filed 1999·Granted Jan 30, 2001·45 cites·16 claims
- 0355US7781144B2Positive resist composition and resist pattern forming methodTOKYO OHKA KOGYO CO LTD·Filed 2006·Granted Aug 24, 2010·5 cites·4 claims
- 0438US7192687B2Positive resist composition and method of forming resist pattern using sameTOKYO OHKA KOGYO CO LTD·Filed 2004·Granted Mar 20, 2007·0 cites·15 claims
- 0529US7858286B2Positive resist composition and method for forming resist patternTOKYO OHKA KOGYO CO LTD·Filed 2006·Granted Dec 28, 2010·0 cites·5 claims
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