Inventor · disambiguated record
Lina Shi
Also filed as: SHI LINA
6 granted patents·6 citations·filing 2011–2024
72Inventor score
Files withINST OF MICROELECTRONICS CAS2YIWU XUANXI E COMMERCE TRADING COMPANY2LI HAILIANG1XIE CHANGQING1
Top patents by PatentIndex Score
6 records- 0169US9546964B2Defect detection system for extreme ultraviolet lithography maskLI HAILIANG·Filed 2012·Granted Jan 17, 2017·2 cites·9 claims
- 0262USD1079324SFloor matYIWU XUANXI E COMMERCE TRADING COMPANY·Filed 2024·Granted Jun 17, 2025·2 cites·1 claims
- 0354USD1083442SFloor matYIWU XUANXI E COMMERCE TRADING COMPANY·Filed 2024·Granted Jul 15, 2025·1 cites·1 claims
- 0451US8736812B2Projection-type photolithography system using composite photon sieveXIE CHANGQING·Filed 2011·Granted May 27, 2014·1 cites·9 claims
- 0544US9442230B2Sub-wavelength extreme ultraviolet metal transmission grating and manufacturing method thereofINST OF MICROELECTRONICS CAS·Filed 2013·Granted Sep 13, 2016·0 cites·19 claims
- 0643US12287454B2Method for fabricating anti-reflective layer on quartz surface by using metal-induced self-masking etching techniqueINST OF MICROELECTRONICS CAS·Filed 2019·Granted Apr 29, 2025·0 cites·4 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →