Inventor · disambiguated record
Takamitsu Furukawa
Also filed as: FURUKAWA TAKAMITSU
8 granted patents·1 pending application·39 citations·filing 2000–2023
81Inventor score
Files withOKI ELECTRIC IND CO LTD4LAPIS SEMICONDUCTOR CO LTD2OKI SEMICONDUCTOR CO LTD2SEMICONDUCTOR LEADING EDGE TEC1
Top patents by PatentIndex Score
9 records- 0179US6511794B1Method of forming resist pattern, and exposure deviceOKI ELECTRIC IND CO LTD·Filed 2000·Granted Jan 28, 2003·19 cites·20 claims
- 0269US12191343B2Semiconductor device and method of manufacturing semiconductor deviceLAPIS SEMICONDUCTOR CO LTD·Filed 2023·Granted Jan 7, 2025·0 cites·3 claims
- 0367US6455438B1Fabrication method for a semiconductor deviceOKI ELECTRIC IND CO LTD·Filed 2000·Granted Sep 24, 2002·14 cites·12 claims
- 0465US11610962B2Semiconductor device and method of manufacturing semiconductor deviceLAPIS SEMICONDUCTOR CO LTD·Filed 2021·Granted Mar 21, 2023·0 cites·6 claims
- 0559US7771897B2Photomask for forming a resist pattern and manufacturing method thereof, and resist-pattern forming method using the photomaskOKI SEMICONDUCTOR CO LTD·Filed 2007·Granted Aug 10, 2010·1 cites·10 claims
- 0652US6838643B2Method and apparatus for performing baking treatment to semiconductor waferOKI ELECTRIC IND CO LTD·Filed 2002·Granted Jan 4, 2005·5 cites·18 claims
- 0745US7972752B2Photomask and method for forming a resist patternOKI SEMICONDUCTOR CO LTD·Filed 2008·Granted Jul 5, 2011·0 cites·20 claims
- 0839US2005181304A1Method of forming fine patternSEMICONDUCTOR LEADING EDGE TEC·Filed 2005·Application pending·0 cites
- 0938US6956641B2Method of forming resist pattern, and exposure deviceOKI ELECTRIC IND CO LTD·Filed 2002·Granted Oct 18, 2005·0 cites·4 claims
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