Inventor · disambiguated record
Makoto Nawata
Also filed as: NAWATA MAKOTO
19 granted patents·3 pending applications·512 citations·filing 1982–2015
96Inventor score
Top patents by PatentIndex Score
22 records- 0195US4631106APlasma processorHITACHI LTD·Filed 1985·Granted Dec 23, 1986·99 cites·12 claims
- 0290US5276386AMicrowave plasma generating method and apparatusHITACHI LTD·Filed 1991·Granted Jan 4, 1994·66 cites·19 claims
- 0388US8142567B2Vacuum processing apparatusKOBAYASHI HIROYUKI·Filed 2009·Granted Mar 27, 2012·16 cites·10 claims
- 0485US5556714AMethod of treating samplesHITACHI LTD·Filed 1994·Granted Sep 17, 1996·68 cites·12 claims
- 0578US5804033AMicrowave plasma processing method and apparatusHITACHI LTD·Filed 1993·Granted Sep 8, 1998·32 cites·6 claims
- 0678US5770100AMethod of treating samplesFiled 1996·Granted Jun 23, 1998·40 cites·8 claims
- 0771US5380397AMethod of treating samplesHITACHI LTD·Filed 1992·Granted Jan 10, 1995·35 cites·21 claims
- 0869US5520771AMicrowave plasma processing apparatusHITACHI LTD·Filed 1995·Granted May 28, 1996·28 cites·10 claims
- 0969US4618398ADry etching methodHITACHI LTD·Filed 1985·Granted Oct 21, 1986·36 cites·2 claims
- 1066US5647944AMicrowave plasma treatment apparatusHITACHI LTD·Filed 1994·Granted Jul 15, 1997·21 cites·10 claims
- 1161US4971651AMicrowave plasma processing method and apparatusHITACHI LTD·Filed 1990·Granted Nov 20, 1990·15 cites·20 claims
- 1252US6444087B2Plasma etching systemHITACHI LTD·Filed 2001·Granted Sep 3, 2002·3 cites·16 claims
- 1349US2010163181A1Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 1448US4530708AAir separation method and apparatus thereforHITACHI LTD·Filed 1983·Granted Jul 23, 1985·11 cites·4 claims
- 1546US5914051AMicrowave plasma processing method and apparatusHITACHI LTD·Filed 1995·Granted Jun 22, 1999·10 cites·6 claims
- 1645US6329298B1Apparatus for treating samplesHITACHI LTD·Filed 1997·Granted Dec 11, 2001·8 cites·2 claims
- 1744US5785807AMicrowave plasma processing method and apparatusHITACHI LTD·Filed 1991·Granted Jul 28, 1998·11 cites·16 claims
- 1841US9607874B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Mar 28, 2017·0 cites·4 claims
- 1939US2002011464A1Method of plasma etchingFiled 2001·Application pending·0 cites
- 2036US6328845B1Plasma-processing method and an apparatus for carrying out the sameHITACHI LTD·Filed 1994·Granted Dec 11, 2001·8 cites·6 claims
- 2135US4459143ATemperature control method for reversing type heat exchanger group of air separation systemHITACHI LTD·Filed 1982·Granted Jul 10, 1984·5 cites·3 claims
- 2233US2015371825A1Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2015·Application pending·0 cites
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