Inventor · disambiguated record
Kenichi Suematsu
Also filed as: SUEMATSU KENICHI
16 granted patents·1 pending application·327 citations·filing 2004–2018
93Inventor score
Top patents by PatentIndex Score
17 records- 0198US7138629B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2004·Granted Nov 21, 2006·151 cites·22 claims
- 0297US7928382B2Detector and inspecting apparatusEBARA CORP·Filed 2006·Granted Apr 19, 2011·51 cites·22 claims
- 0397US7741601B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2008·Granted Jun 22, 2010·36 cites·13 claims
- 0497US7365324B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2006·Granted Apr 29, 2008·49 cites·7 claims
- 0594US8946631B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2014·Granted Feb 3, 2015·11 cites·14 claims
- 0693US7425703B2Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation methodEBARA CORP·Filed 2005·Granted Sep 16, 2008·16 cites·3 claims
- 0786US9406480B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2015·Granted Aug 2, 2016·3 cites·14 claims
- 0883US8742341B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusNOJI NOBUHARU·Filed 2010·Granted Jun 3, 2014·4 cites·13 claims
- 0976US10074510B2Inspection system and inspection image data generation methodEBARA CORP·Filed 2014·Granted Sep 11, 2018·3 cites·5 claims
- 1073US8431892B2Detector and inspecting apparatusHATAKEYAMA MASAHIRO·Filed 2010·Granted Apr 30, 2013·2 cites·26 claims
- 1168US8796621B2Detector and inspecting apparatusEBARA CORP·Filed 2013·Granted Aug 5, 2014·1 cites·18 claims
- 1260US2008315095A1Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation methodEBARA CORP·Filed 2008·Application pending·0 cites
- 1350US9105445B2Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recordedEBARA CORP·Filed 2014·Granted Aug 11, 2015·0 cites·19 claims
- 1448US10002740B2Inspection deviceEBARA CORP·Filed 2017·Granted Jun 19, 2018·0 cites·13 claims
- 1546US10446404B2Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatusEBARA CORP·Filed 2018·Granted Oct 15, 2019·0 cites·7 claims
- 1644US9852878B2Surface processing apparatusEBARA CORP·Filed 2015·Granted Dec 26, 2017·0 cites·8 claims
- 1735US9760984B2Control unit for generating timing signal for imaging unit in inspection system and method for sending out timing signal to imaging unitEBARA CORP·Filed 2015·Granted Sep 12, 2017·0 cites·9 claims
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