Inventor · disambiguated record
Takami Satoh
Also filed as: SATOH TAKAMI
20 granted patents·1 pending application·371 citations·filing 1992–2018
95Inventor score
Top patents by PatentIndex Score
21 records- 0189US5505781AHydrophobic processing apparatus including a liquid delivery systemTOKYO ELECTRON LTD·Filed 1994·Granted Apr 9, 1996·64 cites·11 claims
- 0287US10573539B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 25, 2020·6 cites·10 claims
- 0382US9109934B2Solution processing apparatus, solution processing method, and non-transitory computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2013·Granted Aug 18, 2015·5 cites·15 claims
- 0480US5345639ADevice and method for scrubbing and cleaning substrateTOKYO ELECTRON LTD·Filed 1993·Granted Sep 13, 1994·67 cites·9 claims
- 0579US10483137B2Substrate liquid processing apparatus, substrate liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Nov 19, 2019·3 cites·10 claims
- 0676US9881799B2Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Jan 30, 2018·2 cites·11 claims
- 0776US5518552AMethod for scrubbing and cleaning substrateTOKYO ELECTRON LTD·Filed 1994·Granted May 21, 1996·54 cites·10 claims
- 0876US5488964AWashing apparatus, and washing methodTOKYO ELECTRON LTD·Filed 1992·Granted Feb 6, 1996·45 cites·9 claims
- 0971US10276408B2Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating systemTOKYO ELECTRON LTD·Filed 2015·Granted Apr 30, 2019·2 cites·21 claims
- 1071US5681614AHydrophobic treatment method involving delivery of a liquid process agent to a process spaceTOKYO ELECTRON LTD·Filed 1996·Granted Oct 28, 1997·31 cites·14 claims
- 1166US5782990AMethod for washing objectsTOKYO ELECTRON LTD·Filed 1997·Granted Jul 21, 1998·23 cites·4 claims
- 1265US10067514B2Substrate processing apparatus and liquid mixing methodTOKYO ELECTRON LTD·Filed 2014·Granted Sep 4, 2018·4 cites·9 claims
- 1364US5887604AWashing apparatus, and washing methodTOKYO ELECTRON LTD·Filed 1996·Granted Mar 30, 1999·21 cites·6 claims
- 1464US5671764AWashing apparatus, and washing methodTOKYO ELECTRON LTD·Filed 1995·Granted Sep 30, 1997·21 cites·15 claims
- 1552US9631963B2Solution processing apparatus, solution processing method, and non-transitory computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2015·Granted Apr 25, 2017·0 cites·10 claims
- 1651US8054612B2Plug-in unit including a breaker and an electric deviceTOKYO ELECTRON LTD·Filed 2009·Granted Nov 8, 2011·2 cites·21 claims
- 1751US5514852AHeat treatment deviceTOKYO ELECTRON LTD·Filed 1994·Granted May 7, 1996·21 cites·19 claims
- 1842US9887092B2Etching method, etching apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Feb 6, 2018·0 cites·13 claims
- 1938US2013345996A1Process liquid flowmeterSATOH TAKAMI·Filed 2012·Application pending·0 cites
- 2037US10714365B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jul 14, 2020·0 cites·12 claims
- 2135US11433420B2Solution supply apparatus and solution supply methodTOKYO ELECTRON LTD·Filed 2018·Granted Sep 6, 2022·0 cites·20 claims
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