Inventor · disambiguated record
Shin Matsui
Also filed as: MATSUI SHIN
17 granted patents·7 pending applications·427 citations·filing 1993–2009
95Inventor score
Top patents by PatentIndex Score
24 records- 0193US6408045B1Stage system and exposure apparatus with the sameCANON KK·Filed 1998·Granted Jun 18, 2002·113 cites·71 claims
- 0284US6862080B2Substrate holding device, semiconductor manufacturing apparatus and device manufacturing methodCANON KK·Filed 2001·Granted Mar 1, 2005·25 cites·26 claims
- 0384US6225637B1Electron beam exposure apparatusCANON KK·Filed 1997·Granted May 1, 2001·43 cites·70 claims
- 0483US6054713AElectron beam exposure apparatusCANON KK·Filed 1998·Granted Apr 25, 2000·41 cites·10 claims
- 0579US6984362B2Processing apparatus, measuring apparatus, and device manufacturing methodCANON KK·Filed 2003·Granted Jan 10, 2006·26 cites·5 claims
- 0676US7218383B2Holding system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted May 15, 2007·3 cites·13 claims
- 0774US6616898B2Processing apparatus with pressure control and gas recirculation systemCANON KK·Filed 1999·Granted Sep 9, 2003·36 cites·32 claims
- 0874US5883932ASubstrate holding device and exposing apparatus using the sameCANON KK·Filed 1995·Granted Mar 16, 1999·38 cites·13 claims
- 0972US6404505B2Positioning stage system and position measuring methodCANON KK·Filed 1999·Granted Jun 11, 2002·22 cites·8 claims
- 1071US7187432B2Holding system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Mar 6, 2007·9 cites·4 claims
- 1170US7102735B2Substrate holding device, semiconductor manufacturing apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Sep 5, 2006·2 cites·5 claims
- 1268US5999589ASubstrate holding device and exposing apparatus using the sameCANON KK·Filed 1998·Granted Dec 7, 1999·28 cites·16 claims
- 1364US6930756B2Electron beam exposure apparatus and semiconductor device manufacturing methodCANON KK·Filed 2003·Granted Aug 16, 2005·5 cites·15 claims
- 1463US6982784B2Substrate holding device, semiconductor manufacturing apparatus and device manufacturing methodCANON KK·Filed 2004·Granted Jan 3, 2006·6 cites·3 claims
- 1562US7566422B2Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatusCANON KK·Filed 2005·Granted Jul 28, 2009·3 cites·5 claims
- 1656US2010112194A1Mask fixing device in vacuum processing apparatusCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 1754US2010081355A1Substrate holding apparatus, carrier, substrate processing apparatus, and image display device manufacturing methodCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 1854US2010273387A1Processing Apparatus and Method of Manufacturing Electron Emission Element and Organic EL DisplayCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 1952US5930324AExposure apparatus and device manufacturing method using the sameCANON KK·Filed 1997·Granted Jul 27, 1999·13 cites·9 claims
- 2051US2010079054A1Processing apparatus and image display deviceCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 2148US2009088041A1Display substrate manufacturing method and vacuum processing apparatusCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 2247US2010080891A1Holding mechanism, processing apparatus including holding mechanism, deposition method using processing apparatus, and method of manufacturing image display deviceCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 2344US5277539ASubstrate conveying apparatusCANON KK·Filed 1993·Granted Jan 11, 1994·14 cites·9 claims
- 2441US2006042316A1Method of manufacturing hermetically sealed container and image display apparatusCANON KK·Filed 2005·Application pending·0 cites
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