Inventor · disambiguated record
Mitsunori Sakama
Also filed as: SAKAMA MITSUNORI
87 granted patents·4 pending applications·3,405 citations·filing 1985–2015
99Inventor score
Files withSEMICONDUCTOR ENERGY LAB81SONY CORP5HAYAKAWA MASAHIKO2YAMAZAKI SHUNPEI2SEMICONDUCTOR ENERGY LABORATOT1
Top patents by PatentIndex Score
91 records- 0199US6228751B1Method of manufacturing a semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 1996·Granted May 8, 2001·351 cites·26 claims
- 0299US5674304AMethod of heat-treating a glass substrateSEMICONDUCTOR ENERGY LAB·Filed 1994·Granted Oct 7, 1997·222 cites·25 claims
- 0398US4691995ALiquid crystal filling deviceSEMICONDUCTOR ENERGY LAB·Filed 1986·Granted Sep 8, 1987·501 cites·9 claims
- 0497US5330578APlasma treatment apparatusSEMICONDUCTOR ENERGY LAB·Filed 1992·Granted Jul 19, 1994·221 cites·7 claims
- 0596US6521912B1Semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2000·Granted Feb 18, 2003·94 cites·21 claims
- 0695US6283060B1Plasma CVD apparatusSEMICONDUCTOR ENERGY LAB·Filed 1998·Granted Sep 4, 2001·72 cites·19 claims
- 0795US6268631B1Glass substrate assembly, semiconductor device and method of heat-treating glass substrateSEMICONDUCTOR ENERGY LABORATOT·Filed 1999·Granted Jul 31, 2001·100 cites·27 claims
- 0894US6858898B1Semiconductor device and method for manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2000·Granted Feb 22, 2005·51 cites·56 claims
- 0994US6482752B1Substrate processing apparatus and method and a manufacturing method of a thin film semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 1996·Granted Nov 19, 2002·114 cites·40 claims
- 1093US7064388B2Semiconductor device and method for manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Jun 20, 2006·43 cites·27 claims
- 1193US6919282B2Method of fabricating a semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2003·Granted Jul 19, 2005·60 cites·32 claims
- 1292US7166899B2Semiconductor device, and method of fabricating the sameSEMICONDUCTOR ENERGY LAB·Filed 2005·Granted Jan 23, 2007·17 cites·18 claims
- 1392US5970384AMethods of heat treating silicon oxide films by irradiating ultra-violet lightSEMICONDUCTOR ENERGY LAB·Filed 1995·Granted Oct 19, 1999·95 cites·23 claims
- 1491US6847097B2Glass substrate assembly, semiconductor device and method of heat-treating glass substrateSEMICONDUCTOR ENERGY LAB·Filed 2001·Granted Jan 25, 2005·16 cites·29 claims
- 1591US6160679ARecording medium device for use with a tape cartridge having an auxiliary memory viewable through a cartridge discrimination openingSONY CORP·Filed 1996·Granted Dec 12, 2000·75 cites·18 claims
- 1690US8278195B2Plasma CVD apparatusYAMAZAKI SHUNPEI·Filed 2011·Granted Oct 2, 2012·3 cites·28 claims
- 1790US6632708B2Semiconductor device and method of manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2000·Granted Oct 14, 2003·59 cites·16 claims
- 1890US5929487AGlass substrate assembly, semiconductor device and method of heat-treating glass substrateSEMICONDUCTOR ENERGY LAB·Filed 1995·Granted Jul 27, 1999·51 cites·4 claims
- 1990US5840600AMethod for producing semiconductor device and apparatus for treating semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 1995·Granted Nov 24, 1998·103 cites·25 claims
- 2089US7723218B2Plasma CVD apparatusSEMICONDUCTOR ENERGY LAB·Filed 2005·Granted May 25, 2010·6 cites·111 claims
- 2188US4799776AFerroelectric liquid crystal display device having a single polarizerSEMICONDUCTOR ENERGY LAB·Filed 1986·Granted Jan 24, 1989·67 cites·15 claims
- 2287US7372114B2Semiconductor device, and method of fabricating the sameSEMICONDUCTOR ENERGY LAB·Filed 2006·Granted May 13, 2008·10 cites·10 claims
- 2387US6706648B2APCVD method of forming silicon oxide using an organic silane, oxidizing agent, and catalyst-formed hydrogen radicalSEMICONDUCTOR ENERGY LAB·Filed 2001·Granted Mar 16, 2004·29 cites·24 claims
- 2487US4978203ALiquid crystal device with an apparent hysteresisSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Dec 18, 1990·61 cites·7 claims
- 2586US5866932AInsulating film formed using an organic silane and method of producing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 1996·Granted Feb 2, 1999·59 cites·28 claims
- 2685US4730903AFerroelectric crystal display panel and manufacturing method thereofSEMICONDUCTOR ENERGY LAB·Filed 1986·Granted Mar 15, 1988·59 cites·27 claims
- 2784US7821071B2Semiconductor device and method for manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2009·Granted Oct 26, 2010·6 cites·20 claims
- 2884US6703264B2Method of manufacturing a semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2001·Granted Mar 9, 2004·25 cites·14 claims
- 2984US5079031AApparatus and method for forming thin filmsSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Jan 7, 1992·29 cites·8 claims
- 3083US6323142B1APCVD method of forming silicon oxide using an organic silane, oxidizing agent, and catalyst-formed hydrogen radicalSEMICONDUCTOR ENERGY LAB·Filed 1996·Granted Nov 27, 2001·51 cites·15 claims
- 3182US7452794B2Manufacturing method of a thin film semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2007·Granted Nov 18, 2008·5 cites·72 claims
- 3282US7393723B2Method of manufacturing a semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Jul 1, 2008·22 cites·24 claims
- 3382US6593235B2Semiconductor device with a tapered hole formed using multiple layers with different etching ratesSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Jul 15, 2003·28 cites·30 claims
- 3481US7504343B2Semiconductor device and method for manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2006·Granted Mar 17, 2009·5 cites·44 claims
- 3581US4861143ALiquid crystal display capable of displaying grey toneSEMICONDUCTOR ENERGY LAB·Filed 1987·Granted Aug 29, 1989·48 cites·4 claims
- 3681US4723508APlasma CVD apparatusSEMICONDUCTOR ENERGY LAB·Filed 1986·Granted Feb 9, 1988·25 cites·8 claims
- 3780US5837614AInsulating film and method of producing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 1997·Granted Nov 17, 1998·45 cites·21 claims
- 3879US6673659B2Semiconductor device and method of producing the sameSEMICONDUCTOR ENERGY LAB·Filed 2001·Granted Jan 6, 2004·24 cites·32 claims
- 3978US4828967AElectronic device and its manufacturing methodSEMICONDUCTOR ENERGY LAB·Filed 1986·Granted May 9, 1989·27 cites·9 claims
- 4077US8053338B2Plasma CVD apparatusSEMICONDUCTOR ENERGY LAB·Filed 2009·Granted Nov 8, 2011·1 cites·77 claims
- 4177US7271082B2Method of manufacturing a semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Sep 18, 2007·13 cites·42 claims
- 4277US6396078B1Semiconductor device with a tapered hole formed using multiple layers with different etching ratesSEMICONDUCTOR ENERGY LAB·Filed 1996·Granted May 28, 2002·45 cites·14 claims
- 4377US6025630AInsulating film formed using an organic silane and method of producing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 1998·Granted Feb 15, 2000·36 cites·16 claims
- 4477US5196954ALiquid crystal displaySEMICONDUCTOR ENERGY LAB·Filed 1988·Granted Mar 23, 1993·32 cites·9 claims
- 4575US6499427B1Plasma CVD apparatusSEMICONDUCTOR ENERGY LAB·Filed 2001·Granted Dec 31, 2002·8 cites·10 claims
- 4674US5187601AMethod for making a high contrast liquid crystal display including laser scribing opaque and transparent conductive strips simultaneouslySEMICONDUCTOR ENERGY LAB·Filed 1991·Granted Feb 16, 1993·43 cites·17 claims
- 4773US7691692B2Substrate processing apparatus and a manufacturing method of a thin film semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2008·Granted Apr 6, 2010·2 cites·36 claims
- 4873US6730992B2Semiconductor device and method of manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2003·Granted May 4, 2004·16 cites·10 claims
- 4973US4780794AElectronic deviceSEMICONDUCTOR ENERGY LAB·Filed 1987·Granted Oct 25, 1988·22 cites·11 claims
- 5071US7038302B2Glass substrate assembly, semiconductor device and method of heat-treating glass substrateSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted May 2, 2006·5 cites·24 claims
Showing the top 50 of 91 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →