Inventor · disambiguated record
Kensaku Ida
Also filed as: IDA KENSAKU
5 granted patents·1 pending application·41 citations·filing 2005–2007
78Inventor score
Top patents by PatentIndex Score
6 records- 0189US7265437B2Low k dielectric CVD film formation process with in-situ imbedded nanolayers to improve mechanical propertiesSONY CORP·Filed 2005·Granted Sep 4, 2007·14 cites·16 claims
- 0286US7202564B2Advanced low dielectric constant organosilicon plasma chemical vapor deposition filmsIBM·Filed 2005·Granted Apr 10, 2007·11 cites·29 claims
- 0380US7422975B2Composite inter-level dielectric structure for an integrated circuitSONY CORP·Filed 2005·Granted Sep 9, 2008·11 cites·18 claims
- 0478US7494938B2Advanced low dielectric constant organosilicon plasma chemical vapor deposition filmsIBM·Filed 2007·Granted Feb 24, 2009·5 cites·11 claims
- 0553US7998880B2Low k dielectric CVD film formation process with in-situ imbedded nanolayers to improve mechanical propertiesIBM·Filed 2007·Granted Aug 16, 2011·0 cites·11 claims
- 0635US2006166491A1Dual damascene interconnection having low k layer and cap layer formed in a common PECVD processIDA KENSAKU·Filed 2005·Application pending·0 cites
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