Inventor · disambiguated record
Stephen J. Benner
Also filed as: BENNER STEPHEN J
13 granted patents·7 pending applications·271 citations·filing 1985–2017
93Inventor score
Top patents by PatentIndex Score
20 records- 0194US7040967B2Multi-step, in-situ pad conditioning system and method for chemical mechanical planarizationTBW IND INC·Filed 2005·Granted May 9, 2006·34 cites·24 claims
- 0294US6508697B1Polishing pad conditioning systemFiled 2001·Granted Jan 21, 2003·83 cites·1 claims
- 0392US7575503B2Vacuum-assisted pad conditioning systemTBW IND INC·Filed 2007·Granted Aug 18, 2009·19 cites·20 claims
- 0492US7544113B1Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning systemTBW IND INC·Filed 2005·Granted Jun 9, 2009·19 cites·6 claims
- 0591US7217172B2Enhanced end effector arm arrangement for CMP pad conditioningTBW IND INC·Filed 2006·Granted May 15, 2007·19 cites·12 claims
- 0690US7909910B2Vacuum line clean-out separator systemTBW IND INC·Filed 2007·Granted Mar 22, 2011·21 cites·16 claims
- 0787US7258600B1Vacuum-assisted pad conditioning systemTBW IND INC·Filed 2004·Granted Aug 21, 2007·33 cites·15 claims
- 0885US7901267B1Method for controlling the forces applied to a vacuum-assisted pad conditioning systemTBW IND INC·Filed 2009·Granted Mar 8, 2011·8 cites·3 claims
- 0978US8025555B1System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP systemTBW IND INC·Filed 2011·Granted Sep 27, 2011·3 cites·2 claims
- 1075US7166014B2Chemical mechanical planarization process control utilizing in-situ conditioning processTBW IND INC·Filed 2005·Granted Jan 23, 2007·6 cites·14 claims
- 1174US7052371B2Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning diskTBW IND INC·Filed 2003·Granted May 30, 2006·13 cites·15 claims
- 1266US7913705B2Cleaning cup system for chemical mechanical planarization apparatusTBW IND INC·Filed 2008·Granted Mar 29, 2011·3 cites·8 claims
- 1350US4622739AMethod of providing an improved seal for thermostatic switch housingsTEXAS INSTRUMENTS INC·Filed 1985·Granted Nov 18, 1986·10 cites·12 claims
- 1450US2007207705A1Enhanced end effector arm arrangement for CMP pad conditioningBENNER STEPHEN J·Filed 2007·Application pending·0 cites
- 1546US2009287340A1In-line effluent analysis method and apparatus for CMP process controlCONFLUENSE LLC·Filed 2009·Application pending·0 cites
- 1645US2008160883A1Abrasive configuration for fluid dynamic removal of abraded material and the likeTBW IND INC·Filed 2007·Application pending·0 cites
- 1743US2007087672A1Apertured conditioning brush for chemical mechanical planarization systemsTBW IND INC·Filed 2006·Application pending·0 cites
- 1842US2011177623A1Active Tribology Management of CMP Polishing MaterialCONFLUENSE LLC·Filed 2011·Application pending·0 cites
- 1942US2011039485A1Apertured Abrasive Disk Assembly With Improved Flow DynamicsBENNER STEPHEN J·Filed 2010·Application pending·0 cites
- 2037US2017355059A1Slurry Slip Stream Controller For CMP SystemCONFLUENSE LLC·Filed 2017·Application pending·0 cites
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