Inventor · disambiguated record
Syuzo Fujimaru
Also filed as: FUJIMARU SYUZO
3 granted patents·74 citations·filing 2001–2008
70Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0189US6526329B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Feb 25, 2003·64 cites·12 claims
- 0272US7618203B2Substrate processing method, substrate processing apparatus, and computer readable storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Nov 17, 2009·6 cites·15 claims
- 0368US7844359B2Coating and developing apparatus, operating method for same, and storage medium for the methodTOKYO ELECTRON LTD·Filed 2008·Granted Nov 30, 2010·4 cites·13 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →