Inventor · disambiguated record
Gary E. Sommargren
Also filed as: SOMMARGREN GARY E
34 granted patents·1,525 citations·filing 1980–2004
98Inventor score
Top patents by PatentIndex Score
34 records- 0197US4606638ADistance measuring interferometer and method of useZYGO CORP·Filed 1983·Granted Aug 19, 1986·110 cites·5 claims
- 0297US4594003AInterferometric wavefront measurementZYGO CORP·Filed 1983·Granted Jun 10, 1986·112 cites·19 claims
- 0395US4859066ALinear and angular displacement measuring interferometerZYGO CORP·Filed 1988·Granted Aug 22, 1989·95 cites·74 claims
- 0494US4802765ADifferential plane mirror having beamsplitter/beam folder assemblyZYGO CORP·Filed 1987·Granted Feb 7, 1989·94 cites·52 claims
- 0593US5969848AMicromachined electrostatic vertical actuatorUNIV CALIFORNIA·Filed 1997·Granted Oct 19, 1999·126 cites·18 claims
- 0693US4963022AMethod and apparatus for generating a straight reference lineZYGO CORP·Filed 1988·Granted Oct 16, 1990·78 cites·42 claims
- 0792US5548403APhase shifting diffraction interferometerUNIV CALIFORNIA·Filed 1994·Granted Aug 20, 1996·70 cites·24 claims
- 0892US4688940AHeterodyne interferometer systemZYGO CORP·Filed 1985·Granted Aug 25, 1987·103 cites·58 claims
- 0991US4353650ALaser heterodyne surface profilerUS ENERGY·Filed 1980·Granted Oct 12, 1982·48 cites·15 claims
- 1090US4733967AApparatus for the measurement of the refractive index of a gasZYGO CORP·Filed 1987·Granted Mar 29, 1988·77 cites·35 claims
- 1188US4685803AMethod and apparatus for the measurement of the refractive index of a gasZYGO CORP·Filed 1986·Granted Aug 11, 1987·71 cites·20 claims
- 1286US5933236APhase shifting interferometerUNIV CALIFORNIA·Filed 1997·Granted Aug 3, 1999·62 cites·14 claims
- 1384US4746216AAngle measuring interferometerZYGO CORP·Filed 1986·Granted May 24, 1988·44 cites·137 claims
- 1483US4881815ALinear and angular displacement measuring interferometerZYGO CORP·Filed 1988·Granted Nov 21, 1989·41 cites·40 claims
- 1580US4693605ADifferential plane mirror interferometerZYGO CORP·Filed 1986·Granted Sep 15, 1987·42 cites·33 claims
- 1677US5218424AFlying height and topography measuring interferometerZYGO CORP·Filed 1992·Granted Jun 8, 1993·26 cites·16 claims
- 1777US4787747AStraightness of travel interferometerZYGO CORP·Filed 1987·Granted Nov 29, 1988·33 cites·43 claims
- 1876US4752133ADifferential plane mirror interferometerZYGO CORP·Filed 1985·Granted Jun 21, 1988·32 cites·37 claims
- 1976US4684828AApparatus to transform a single frequency, linearly polarized laser beam into a beam with two, orthogonally polarized frequenciesZYGO CORP·Filed 1985·Granted Aug 4, 1987·37 cites·33 claims
- 2072US4456339ALaser heterodyne surface profilerUS ENERGY·Filed 1982·Granted Jun 26, 1984·21 cites·4 claims
- 2169US5133599AHigh accuracy linear displacement interferometer with probeZYGO CORP·Filed 1991·Granted Jul 28, 1992·23 cites·27 claims
- 2268US4950078AHigh accuracy differential plane mirror interferometerZYGO CORP·Filed 1988·Granted Aug 21, 1990·23 cites·35 claims
- 2367US4687958AApparatus to transform a single frequency, linearly polarized laser beam into a high efficiency beam with two, orthogonally polarized frequenciesZYGO CORP·Filed 1985·Granted Aug 18, 1987·26 cites·27 claims
- 2466US6704112B1Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lensesUNIV CALIFORNIA·Filed 2000·Granted Mar 9, 2004·13 cites·20 claims
- 2564US4802764ADifferential plane mirror interferometer having beamsplitter/beam folder assemblyYOUNG PETER S·Filed 1987·Granted Feb 7, 1989·23 cites·36 claims
- 2664US4717250AAngle measuring interferometerZYGO CORP·Filed 1986·Granted Jan 5, 1988·21 cites·94 claims
- 2758US4807997AAngular displacement measuring interferometerZYGO CORP·Filed 1987·Granted Feb 28, 1989·16 cites·30 claims
- 2857US5028137AAngular displacement measuring interferometerZYGO CORP·Filed 1989·Granted Jul 2, 1991·16 cites·13 claims
- 2951US6876456B2Absolute calibration of optical flatsUNIV CALIFORNIA·Filed 2002·Granted Apr 5, 2005·5 cites·2 claims
- 3047US5586133AApparatus for increasing the frequency difference and stability of orthogonally polarized beams from a Zeeman split laserDEBELL GARY W·Filed 1995·Granted Dec 17, 1996·16 cites·24 claims
- 3145US6909510B2Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lensesUNIV CALIFORNIA·Filed 2004·Granted Jun 21, 2005·3 cites·21 claims
- 3244US6177993B1Inspection of lithographic mask blanks for defectsUNIV CALIFORNIA·Filed 1999·Granted Jan 23, 2001·10 cites·29 claims
- 3338US6014264AEmbedded fiducials in optical surfacesUNIV CALIFORNIA·Filed 1998·Granted Jan 11, 2000·6 cites·21 claims
- 3424US5022061AAn image focusing means by using an opaque object to diffract x-raysUS ENERGY·Filed 1990·Granted Jun 4, 1991·2 cites·29 claims
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