Inventor · disambiguated record
Daniel Goodman
Also filed as: GOODMAN DANIEL · GOODMAN DANIEL L
21 granted patents·4 pending applications·295 citations·filing 1995–2024
94Inventor score
Top patents by PatentIndex Score
25 records- 0193US9421617B2Substrate holderGOODMAN DANIEL·Filed 2012·Granted Aug 23, 2016·20 cites·6 claims
- 0291US5659223ASystem for extracting a high power beam comprising air dynamic and foil windowsSCIENCE RESEARCH LAB INC·Filed 1995·Granted Aug 19, 1997·141 cites·20 claims
- 0385US8967935B2Substrate loader and unloaderGOODMAN DANIEL·Filed 2011·Granted Mar 3, 2015·6 cites·22 claims
- 0484US8613474B2Substrate loader and unloader having a Bernoulli supportGOODMAN DANIEL·Filed 2011·Granted Dec 24, 2013·5 cites·30 claims
- 0582US9988735B2Electrochemical deposition apparatus and methods for controlling the chemistry thereinTEL NEXX INC·Filed 2014·Granted Jun 5, 2018·2 cites·9 claims
- 0682US9637836B2Electrochemical deposition apparatus and methods for controlling the chemistry thereinTEL NEXX INC·Filed 2014·Granted May 2, 2017·2 cites·14 claims
- 0781US5997682APhase-separated dual-cure elastomeric adhesive formulations and methods of using the sameSCIENCE RESEARCH LAB·Filed 1997·Granted Dec 7, 1999·59 cites·19 claims
- 0878US8420981B2Apparatus for thermal processing with micro-environmentGOODMAN DANIEL·Filed 2009·Granted Apr 16, 2013·8 cites·44 claims
- 0977US9117856B2Substrate loader and unloader having an air bearing supportGOODMAN DANIEL·Filed 2011·Granted Aug 25, 2015·3 cites·10 claims
- 1074US9508582B2Parallel single substrate marangoni moduleKEIGLER ARTHUR·Filed 2012·Granted Nov 29, 2016·2 cites·19 claims
- 1166US11887874B2Adaptive focusing and transport system for electroplatingASMPT NEXX INC·Filed 2023·Granted Jan 30, 2024·0 cites·7 claims
- 1265US6110318ASystem for selective electron beam irradiationSCIENCE RESEARCH LAB·Filed 1997·Granted Aug 29, 2000·24 cites·26 claims
- 1362US11942341B2Adaptive focusing and transport system for electroplatingASMPT NEXX INC·Filed 2022·Granted Mar 26, 2024·0 cites·8 claims
- 1458US2025343063A1Clean workpiece loader and edge protection holder for wet chemical semiconductor processingASMPT NEXX INC·Filed 2024·Application pending·0 cites
- 1554US9449862B2Parallel single substrate processing systemKEIGLER ARTHUR·Filed 2012·Granted Sep 20, 2016·0 cites·20 claims
- 1654US5891292AMethod of making fiber reinforced composites and coatingsSCIENCE RESEARCH LAB INC·Filed 1996·Granted Apr 6, 1999·23 cites·44 claims
- 1753US9293356B2Parallel single substrate processing systemKEIGLER ARTHUR·Filed 2012·Granted Mar 22, 2016·0 cites·20 claims
- 1850US9147588B2Substrate processing pallet with coolingGOODMAN DANIEL·Filed 2007·Granted Sep 29, 2015·0 cites·27 claims
- 1945US2011024964A1Substrate processing pallet with coolingNEXX SYSTEMS INC·Filed 2010·Application pending·0 cites
- 2038US8858755B2Edge bevel removal apparatus and methodGOODMAN DANIEL·Filed 2012·Granted Oct 14, 2014·0 cites·25 claims
- 2137US11174544B2Batch processing system with vacuum isolationASM NEXX INC·Filed 2019·Granted Nov 16, 2021·0 cites·12 claims
- 2237US10074554B2Workpiece loader for a wet processing systemTEL NEXX INC·Filed 2016·Granted Sep 11, 2018·0 cites·20 claims
- 2336US9714474B2Seed layer deposition in microscale featuresKEIGLER ARTHUR·Filed 2010·Granted Jul 25, 2017·0 cites·5 claims
- 2435US2015047674A1Method and apparatus for removal of photoresist using improved chemistryTEL NEXX INC·Filed 2013·Application pending·0 cites
- 2529US2016365317A1Method and apparatus for forming emi shielding layers on semiconductor packagesTEL NEXX INC·Filed 2016·Application pending·0 cites
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