Inventor · disambiguated record
Stephan Uhlemann
Also filed as: UHLEMANN STEPHAN
20 granted patents·307 citations·filing 1994–2020
95Inventor score
Files withCEOS GMBH6ZEISS CARL MICROSCOPY GMBH3KNIPPELMEYER RAINER2UHLEMANN STEPHAN2CARL ZEISS SMT A G1
Top patents by PatentIndex Score
20 records- 0196US9224576B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Dec 29, 2015·18 cites·10 claims
- 0296US7554094B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsCARL ZEISS SMT A G·Filed 2007·Granted Jun 30, 2009·29 cites·23 claims
- 0394US9673024B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jun 6, 2017·9 cites·15 claims
- 0493US8637834B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2011·Granted Jan 28, 2014·17 cites·21 claims
- 0593US8097847B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2009·Granted Jan 17, 2012·16 cites·12 claims
- 0691US6770878B2Electron/ion gun for electron or ion beams with high monochromasy or high current densityCEOS GMBH·Filed 2001·Granted Aug 3, 2004·44 cites·8 claims
- 0789US10504681B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Dec 10, 2019·3 cites·14 claims
- 0888US5449914AImaging electron energy filterZEISS STIFTUNG·Filed 1994·Granted Sep 12, 1995·53 cites·13 claims
- 0983US11081313B2Particle-optical corrector which is free from axial aberrations of sixth order and electron microscope with correctorCEOS CORRECTED ELECTRON OPTICAL SYSTEMS GMBH·Filed 2020·Granted Aug 3, 2021·2 cites·19 claims
- 1082US6605810B1Device for correcting third-order spherical aberration in a lens, especially the objective lens of an electronic microscopeFiled 1998·Granted Aug 12, 2003·42 cites·6 claims
- 1178US6903337B2Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the sameZEISS CARL SMT AG·Filed 2002·Granted Jun 7, 2005·15 cites·34 claims
- 1276US7745783B2Monochromator and radiation source with monochromatorCEOS GMBH·Filed 2008·Granted Jun 29, 2010·4 cites·21 claims
- 1373US7135677B2Beam guiding arrangement, imaging method, electron microscopy system and electron lithography systemZEISS CARL NTS GMBH·Filed 2003·Granted Nov 14, 2006·11 cites·44 claims
- 1471US7800076B2Electron-optical corrector for aplanatic imaging systemsUHLEMANN STEPHAN·Filed 2007·Granted Sep 21, 2010·3 cites·19 claims
- 1571US6646267B1Method for eliminating first, second and third-order axial image deformations during correction of the third-order spherical aberration in electron optical systemsFiled 1998·Granted Nov 11, 2003·24 cites·13 claims
- 1669US6797962B1Electrostatic corrector for eliminating the chromatic aberration of particle lensesCEOS GMBH·Filed 2000·Granted Sep 28, 2004·10 cites·7 claims
- 1768US7800074B2Electron-optical corrector for an aplanatic imaging systemUHLEMANN STEPHAN·Filed 2006·Granted Sep 21, 2010·2 cites·19 claims
- 1854US6836372B2Electrostatic correctorCEOS GMBH·Filed 2001·Granted Dec 28, 2004·3 cites·8 claims
- 1946US6995378B2Lens array with a laterally movable optical axis for corpuscular raysCEOS GMBH·Filed 2002·Granted Feb 7, 2006·2 cites·20 claims
- 2039US8362442B2CorrectorCEOS GMBH·Filed 2010·Granted Jan 29, 2013·0 cites·16 claims
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