Inventor · disambiguated record
Joachim Zach
Also filed as: ZACH JOACHIM
14 granted patents·1 pending application·171 citations·filing 1984–2011
92Inventor score
Technology areasH01J
Top patents by PatentIndex Score
15 records- 0190US7807965B2Corrector for axial and off-axial beam pathsCEOS GMBH·Filed 2008·Granted Oct 5, 2010·14 cites·11 claims
- 0289US7060986B2Automated method of correcting aberrations in electron beam, method of visualizing aberrations, and automated aberration correctorJEOL LTD·Filed 2005·Granted Jun 13, 2006·20 cites·7 claims
- 0388US4896036ADetector objective for scanning microscopesSIEMENS AG·Filed 1988·Granted Jan 23, 1990·41 cites·21 claims
- 0487US4714833AArrangement for detecting secondary and/or backscatter electrons in an electron beam apparatusSIEMENS AG·Filed 1986·Granted Dec 22, 1987·37 cites·14 claims
- 0583US7786450B2Multipole coilsCEOS GMBH·Filed 2008·Granted Aug 31, 2010·11 cites·29 claims
- 0683US7355175B2Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beamJEOL LTD·Filed 2005·Granted Apr 8, 2008·8 cites·26 claims
- 0782US6858844B2Method for detecting geometrical-optical aberrationsFiled 2000·Granted Feb 22, 2005·21 cites·13 claims
- 0870US7928379B2Phase plate, imaging method, and electron microscopeCEOS GMBH·Filed 2007·Granted Apr 19, 2011·2 cites·19 claims
- 0967US8314402B2CorrectorZACH JOACHIM·Filed 2011·Granted Nov 20, 2012·3 cites·15 claims
- 1059US7012261B2Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lensJEOL LTD·Filed 2004·Granted Mar 14, 2006·5 cites·13 claims
- 1156US4623794AParticle beam blanking systemROSE HARALD·Filed 1984·Granted Nov 18, 1986·9 cites·4 claims
- 1255US7973289B2Method for producing image contrast by phase shifting in electron opticsCEOS GMBH·Filed 2009·Granted Jul 5, 2011·0 cites·28 claims
- 1352US2009079531A1Multipole coilsCEOS GMBH·Filed 2008·Application pending·0 cites
- 1451US7781742B2CorrectorCEOS GMBH·Filed 2008·Granted Aug 24, 2010·0 cites·6 claims
- 1539US8362442B2CorrectorCEOS GMBH·Filed 2010·Granted Jan 29, 2013·0 cites·16 claims
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