Inventor · disambiguated record
Fred Dennis Egley
Also filed as: EGLEY FRED · EGLEY FRED D · EGLEY FRED DENNIS
12 granted patents·1 pending application·36 citations·filing 2004–2020
87Inventor score
Top patents by PatentIndex Score
13 records- 0187US8313635B2Bare aluminum baffles for resist stripping chambersEGLEY FRED D·Filed 2010·Granted Nov 20, 2012·9 cites·11 claims
- 0284US8584612B2UV lamp assembly of degas chamber having rotary shuttersHART WILLIAM T·Filed 2009·Granted Nov 19, 2013·15 cites·14 claims
- 0383US7811409B2Bare aluminum baffles for resist stripping chambersLAM RES CORP·Filed 2007·Granted Oct 12, 2010·6 cites·10 claims
- 0469US10306776B1Substrate processing system printed-circuit control board assembly with one or more heater layersLAM RES CORP·Filed 2017·Granted May 28, 2019·1 cites·19 claims
- 0569US10119867B2Multichannel thermocouple compensation for three dimensional temperature gradientLAM RES CORP·Filed 2016·Granted Nov 6, 2018·1 cites·20 claims
- 0669US9279731B2Multichannel thermocouple compensation for three dimensional temperature gradientLAM RES CORP·Filed 2013·Granted Mar 8, 2016·2 cites·13 claims
- 0766US8854451B2Automated bubble detection apparatus and methodCORMIER JOSH·Filed 2011·Granted Oct 7, 2014·2 cites·14 claims
- 0855US8859432B2Bare aluminum baffles for resist stripping chambersLAM RES CORP·Filed 2012·Granted Oct 14, 2014·0 cites·13 claims
- 0948US11901944B2Power and data transmission to substrate support in plasma chambers via optical fiberLAM RES CORP·Filed 2020·Granted Feb 13, 2024·0 cites·24 claims
- 1040US8992722B2Direct drive arrangement to control confinement rings positioning and methods thereofRASNICK JOHN W·Filed 2009·Granted Mar 31, 2015·0 cites·8 claims
- 1140US2005284573A1Bare aluminum baffles for resist stripping chambersEGLEY FRED D·Filed 2004·Application pending·0 cites
- 1239US10509425B2Virtual metrology method for ESC temperature estimation using thermal control elementsLAM RES CORP·Filed 2017·Granted Dec 17, 2019·0 cites·16 claims
- 1337US8742666B2Radio frequency (RF) power filters and plasma processing systems including RF power filtersLONG MAOLIN·Filed 2010·Granted Jun 3, 2014·0 cites·14 claims
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