Inventor · disambiguated record
Johannes Adrianus Antonius Theodorus Dams
Also filed as: DAMS JOHANNES ADRIANUS ANTONIU · DAMS JOHANNES ADRIANUS ANTONIUS · DAMS JOHANNES ADRIANUS ANTONIUS THEODORUS
18 granted patents·2 pending applications·86 citations·filing 2003–2021
92Inventor score
Files withASML NETHERLANDS BV14DAMS JOHANNES ADRIANUS ANTONIUS THEODORUS3MAGNETIC INNOVATIONS B V2SEISMIC MECHATRONICS B V1
Top patents by PatentIndex Score
20 records- 0179US7084956B2Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting deviceASML NETHERLANDS BV·Filed 2004·Granted Aug 1, 2006·17 cites·11 claims
- 0276US10191392B2Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuatorASML NETHERLANDS BV·Filed 2015·Granted Jan 29, 2019·2 cites·24 claims
- 0375US7385679B2Lithographic apparatus and actuatorASML NETHERLANDS BV·Filed 2005·Granted Jun 10, 2008·4 cites·30 claims
- 0471US7541699B2Magnet assembly, linear actuator, planar motor and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 2, 2009·6 cites·10 claims
- 0570US8803644B2Magnetic actuatorDAMS JOHANNES ADRIANUS ANTONIUS THEODORUS·Filed 2009·Granted Aug 12, 2014·6 cites·7 claims
- 0669US7385678B2Positioning device and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Jun 10, 2008·10 cites·29 claims
- 0768US7126666B2Lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 24, 2006·12 cites·16 claims
- 0866US7307689B2Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearingASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·10 cites·22 claims
- 0960US7184123B2Lithographic optical systemASML NETHERLANDS BV·Filed 2004·Granted Feb 27, 2007·8 cites·30 claims
- 1052US7259832B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 21, 2007·3 cites·21 claims
- 1152US7145634B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 5, 2006·4 cites·27 claims
- 1249US2023420170A1Electromagnetic actuator and valve having the electromagnetic actuatorMAGNETIC INNOVATIONS B V·Filed 2021·Application pending·0 cites
- 1348US6885117B2Magnetic actuator under piezoelectric controlASML NETHERLANDS BV·Filed 2003·Granted Apr 26, 2005·2 cites·13 claims
- 1447US7061587B2Control system, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jun 13, 2006·2 cites·19 claims
- 1546US7978307B2Gas bearing, and lithographic apparatus provided with such a bearingASML NETHERLANDS BV·Filed 2006·Granted Jul 12, 2011·0 cites·14 claims
- 1641US11569016B2Coil assembly for magnetic actuator, magnetic actuator and manufacturing methodMAGNETIC INNOVATIONS B V·Filed 2019·Granted Jan 31, 2023·0 cites·27 claims
- 1738US8077287B2Method of preparing components, prepared component, lithographic apparatus and device manufacturing methodDAMS JOHANNES ADRIANUS ANTONIUS THEODORUS·Filed 2004·Granted Dec 13, 2011·0 cites·22 claims
- 1835US2024004094A1Seismic shakerSEISMIC MECHATRONICS B V·Filed 2021·Application pending·0 cites
- 1932US7280182B2Lithographic apparatus, device manufacturing method and computer programASML NETHERLANDS BV·Filed 2004·Granted Oct 9, 2007·0 cites·7 claims
- 2029US8922197B2Speed sensorDAMS JOHANNES ADRIANUS ANTONIUS THEODORUS·Filed 2008·Granted Dec 30, 2014·0 cites·22 claims
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