Inventor · disambiguated record
Anil Desai
Also filed as: DESAI ANIL · DESAI ANIL A
5 granted patents·878 citations·filing 1984–2002
86Inventor score
Top patents by PatentIndex Score
5 records- 0195US5578821AElectron beam inspection system and methodKLA INSTR CORP·Filed 1995·Granted Nov 26, 1996·421 cites·51 claims
- 0295US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 0371US6791095B2Method and system of using a scanning electron microscope in semiconductor wafer inspection with Z-stage focusHERMES MICROVISION TAIWAN INC·Filed 2002·Granted Sep 14, 2004·10 cites·23 claims
- 0470US4647764ARotational and focusing apparatus for turret mounted lensesKLA INSTR CORP·Filed 1984·Granted Mar 3, 1987·26 cites·22 claims
- 0567US4604910AApparatus for accurately positioning an object at each of two locationsKLA INSTR CORP·Filed 1984·Granted Aug 12, 1986·21 cites·7 claims
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