Inventor · disambiguated record
Dan Meisburger
Also filed as: MEISBURGER DAN
5 granted patents·755 citations·filing 1994–2001
87Inventor score
Top patents by PatentIndex Score
5 records- 0197US5717204AInspecting optical masks with electron beam microscopyKLA INSTR CORP·Filed 1996·Granted Feb 10, 1998·148 cites·8 claims
- 0296US5665968AInspecting optical masks with electron beam microscopyKLA INSTR CORP·Filed 1996·Granted Sep 9, 1997·120 cites·2 claims
- 0395US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 0491US6753947B2Lithography system and method for device manufactureULTRATECH STEPPER INC·Filed 2001·Granted Jun 22, 2004·53 cites·100 claims
- 0588US6556279B1Motion compensation system and method for lithographyULTRATECH STEPPER INC·Filed 2001·Granted Apr 29, 2003·34 cites·25 claims
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