Inventor · disambiguated record
Manabu Oie
Also filed as: OIE MANABU
5 granted patents·6 citations·filing 2015–2022
66Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0182US10157784B2Integration of a self-forming barrier layer and a ruthenium metal liner in copper metallizationTOKYO ELECTRON LTD·Filed 2017·Granted Dec 18, 2018·4 cites·18 claims
- 0274US9607888B2Integration of ALD barrier layer and CVD Ru liner for void-free Cu fillingTOKYO ELECTRON LTD·Filed 2015·Granted Mar 28, 2017·2 cites·20 claims
- 0361US12300467B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted May 13, 2025·0 cites·18 claims
- 0448US11742228B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2021·Granted Aug 29, 2023·0 cites·16 claims
- 0539US11899476B2Method and apparatus for measuring gas flowTOKYO ELECTRON LTD·Filed 2021·Granted Feb 13, 2024·0 cites·9 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →